1.
Aligning the focusing optics
1.1
Alignment of the focusing optics to
the processing plane
In order to get good processing results, the optical axis of the
focusing optics has to be aligned exactly vertically to the proc-
essing plane.
1
Reference surface
2
Workpiece
Fig. 112281
1. Align the reference surface vertically to the Y direction of the
processing plane.
4
‐
4
Aligning the focusing optics
2022-03
12-29-01-A1-CRen
Aligning the reference
surface
Summary of Contents for KF023
Page 1: ...Operator s manual Programmable focusing optics PFO 33 KF023...
Page 2: ......
Page 6: ...II Good to know 2022 03 12 29 01 A1 CRen...
Page 12: ...0 6 Table of contents 2022 03 12 29 01 A1 CRen...
Page 81: ...Protective glass monitoring active Fig 112272 12 29 01 A1 CRen 2022 03 Installation 2 43...
Page 90: ...2 52 Ambient conditions 2022 03 12 29 01 A1 CRen...
Page 112: ...3 22 Software 2022 03 12 29 01 A1 CRen...
Page 142: ...4 30 Adjusting the observation optics 2022 03 12 29 01 A1 CRen...
Page 170: ...5 28 Cooling water 2022 03 12 29 01 A1 CRen...
Page 176: ...6 6 Informing the service department 2022 03 12 29 01 A1 CRen...