Thyracont VSL53D, Operating Instructions Manual

Page: 59 / 64

59
7 Technical Data
Measurement principle piezo-resistive / heat conduction Pirani (Pirani
depending on gas type)
Measuring range absolute: 1200 - 1.0x10
-4
mbar (900 -
1.0x10
-4
Torr)
relative: -1060 ... +340 mbar (-795 ...
+255 Torr) (depending on ambient pressure)
Max. overload 4 bar abs.
Accuracy absolute pressure:
1200 ... 40 mbar: 0.3% f. scale end
40 ... 2.0x10
-3
mbar: 10% f. reading
relative pressure:
0.25% f. span
Repeatability 1200 ... 40 mbar: 0.1% f. scale end
40 ... 1.0x10
-2
mbar: 2% f. reading
Materials in contact
with vacuum stainl. steel 1.4307, tungsten, nickel, glass,
gold, silicon oxide
Reaction time 40 ms
Operating temperature 5 ... 60
◦
C
Storage temperature -40 ... +65
◦
C
Bake-out temperature max. 125
◦
C at the flange (voltage supply
switched-off)
Voltage supply 20 - 30 VDC
VSL-RS485-200116