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Technical Data
Measurement Principle
Heat conduction Pirani / Hot Cathode Bayard Alpert
Measuring Range
1000 - 5.0x10-10 mbar (750 - 5,0x10-10 Torr)
Max. Overload
4 bar abs.
Accuracy
1000 … 10 mbar: ca. 30 % f.r. (from reading)
10 … 10
-8
mbar: ca. 10 % f.r.
Materials with vacuum
contact
stainl. steel 1.4301, tungsten, nickel, glass, ceramic,
iridium
Filaments Bayard Alpert
yttria coated iridium
Emission Current
9 µA, 100 µA, 1.0 mA, 2.0 mA
Degas Method
ohmic heating of the anode
Reaction Time
200 ms
Summary of Contents for VSH88D
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