Thyracont VSH87PN, Operating Instructions Manual

Page: 33 / 48

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4.2 Status LED
The status LED of the VSH signalizes the following operational states:
4.3 Bake-Out
When a bake-out of the vacuum chamber is performed with the VSH being moun-
ted to the chamber, the temperature at the sensor flange must not exceed 180
◦
C.
The transducer’s voltage supply must be switched-off while the
chamber is heated. Otherwise a damage of the electronics can be
the result!
VSH-Profinet-200116