40
VSPE-de-171117
7
Technical Data
Measurement Principle
heat conduction Pirani
depending on gas type
Measuring Range
VSP: 1000 - 1x10
-4
mbar (750 - 1x10
-4
Torr)
VCP: 1000 - 5x10
-4
mbar (750 - 5x10
-4
Torr)
Max. Overload
10 bar abs.
Accuracy
VSP: 1000 - 20 mbar: approx. 30 % f. reading
20 - 0.002 mbar: 10 % f. reading
VCP: 1000 - 10 mbar: approx. 30 % f. reading
10 - 0.01 mbar: 10 % f. reading
Repeatability
VSP: 20 - 0,002 mbar: 2 % f. reading
VCP: 10 - 0,01 mbar: 5 % f. reading
Materials with vacuum
contact
VSP: stainl. steel 1.4307, tungsten, nickel, glass
VCP: stainl. steel 1.4307, platin/rhodium, nickel, glass
Reaction Time
40 ms
Operating Temperature
5...60°C
Storage Temperature
-40...+65 °C
VSP63E
VSP64E
Summary of Contents for VCP63E
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Page 42: ...42 VSPE de 171117 Declaration of Conformity ...
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