23
VSPE-de-171117
Content
1
Safety Instructions ....................................................................... 24
2
Vacuum Transducer VSP / VCP .................................................. 25
2.1
For Orientation ......................................................................... 25
2.2
Delivery Content ....................................................................... 25
2.3
Product Description .................................................................. 25
3
Installation .................................................................................... 27
3.1
Notes for Installation ................................................................ 27
3.2
Vacuum Connection ................................................................. 27
3.3
Electrical Connection ............................................................... 28
3.3.1
Voltage Supply / RS485 Interface ..................................... 28
3.3.2
EtherCAT ECAT Out / ECAT In ........................................ 29
4
Operation ...................................................................................... 30
4.1
General ..................................................................................... 30
4.2
Status LED ............................................................................... 31
4.3
Bake-Out .................................................................................. 31
5
Communication ............................................................................ 32
5.1
The Serial RS485 Interface Of The Transducer ...................... 32
5.2
The EtherCAT Interface Of The Transducer ............................ 33
5.3
Survey Of Parameters .............................................................. 34
5.4
Device Parameters And Information ........................................ 35
5.5
Measurement Query ................................................................ 36
5.6
Readjustment ........................................................................... 36
5.7
Sensor Parameters .................................................................. 37
6
Maintenance and Service ............................................................ 38
7
Technical Data .............................................................................. 40
Declaration of Conformity .................................................................... 42
Manufacturer:
Thyracont Vacuum Instruments GmbH
Max Emanuel Straße 10
D 94036 Passau
Tel.: ++49/851/95986-0
email: [email protected]
Internet: http://www.thyracont-vacuum.com
Summary of Contents for VCP63E
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Page 22: ...22 VSPE de 171117 Konformitätserklärung ...
Page 39: ...39 VSPE de 171117 ...
Page 42: ...42 VSPE de 171117 Declaration of Conformity ...
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