
Page 67 of 67
TVP Manual (full) March 2007 CE rev 03.doc
Pumping efficiency
Mbar
98%
95%
90%
6.7E+00
-41
-32
-25
2.7E+00
-49
-41
-34
1.3E+00
-54
-47
-41
6.7E-01
-60
-53
-47
2.7E-01
-66
-60
-54
1.3E-01
-71
-65
-60
6.7E-02
-76
-70
-65
2.7E-02
-82
-76
-71
1.3E-02
-86
-80
-76
6.7E-03
-90
-84
-80
2.7E-03
-95
-90
-86
1.3E-03
-98
-93
-90
6.7E-04
-102
-97
-93
2.7E-04
-106
-102
-98
1.3E-04
-109
-105
-102
6.7E-05
-112
-108
-105
2.7E-05
-116
-112
-109
1.3E-05
-119
-115
-112
6.7E-06
-122
-118
-115
2.7E-06
-125
-122
-118
1.3E-06
-128
-124
-122
6.7E-07
-130
-127
-124
2.7E-07
-133
-130
-128
1.3E-07
-135
-132
-130
6.7E-08
-137
-135
-132
2.7E-08
-140
-137
-135
1.3E-08
-142
-140
-137
6.7E-09
-144
-142
-140
2.7E-09
-147
-144
-142
1.3E-09
-148
-146
-144