
34
Figure 3-17 Dialog box of General parameters for WL Scan
2
)
Instrument
As shown in Figure 3-18, the introduction of various system parameters of the
instrument is as follows:
Figure 3-18 Dialog box of Instrument parameters for WL Scan
Slit
EX Slit and EM Slit of FL970 can be adjusted, which are respectively: 20nm, 10nm, 5nm,