MEMS footprints
UM0542
10/20
4.3 LGA16
(D)
package
Figure 7.
MEMS footprint (LGA16 (D) package)
Table 3.
Mechanical data (LGA16 (D) package)
Symbol
Dimension
Unit
Xs
0.65
mm
Ys
0.975
mm
Xm
3.25
mm
Ym
1.7
mm
Xd
1.0
mm
Yd
1.0
mm
Height
4.4
mm
Width
7.5
mm
Ym
Xm
ai14149
Ys
Xs
Width
Height
Xd
Yd
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