UM0542
MEMS footprints
9/20
4.2 LGA14
package
Figure 6.
MEMS footprint (LGA14 package)
Table 2.
Mechanical data (LGA14 package)
Symbol
Dimension
Unit
Xs
0.64
mm
Ys
0.975
mm
Xm
2.0
mm
Ym
1.0
mm
Xd
0.8
mm
Height
3.0
mm
Width
5.0
mm
Ym
Xm
ai14148
Ys
Xs
Width
Height
Xd
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