-34-
No. ZK2-OM01301
(8) Sound absorbing material
(10 pcs. per set)
ZK2-SE1-1-A
(9) Vacuum port adapter assembly
(Purchasing order is available in units of 1 piece.)
ZK2-VA1S 8 -A
(10) Filter element
(10 pcs. per set)
ZK2-FE1-3-A
(11)
Body gasket
Note)
(
10 pcs. per set
)
ZK2-BG5
1
-A
Note)
When ZK2-BG5-2-A is mounted, the workpiece cannot be removed until vacuum is
released.
One-touch fitting size
6
ø6 One-touch fitting
Metric size
8
ø8 One-touch fitting
7
ø1/4
” One-touch fitting
Inch size
9
ø5/16
” One-touch fitting
Sound absorbing material hole diameter
1
300
μm
1
One check valve type
(All specifications other than vacuum switch with energy saving function and
exhaust interference prevention valve)
2
Two check valve type
(Vacuum switch with energy saving function and exhaust interference prevention
valve)
Specification
Nominal filtration rating
3
30
μm