- 5 -
2. How to order
XGTP 3 1 2 - 50336 - 1 C N
Table 1. Auto switch and the connector
Symbol
Auto switch
Connector
Nil
-
-
A
D-A93
(2pcs)
Lead wire: 0.5m
C
Multiple connector(AMP)
*C016 30D006 100 12 made by AMP is
recommended for the connector (female type)
F
D-sub connector
*CDE-9SF05 made by HIROSE ELECTRIC CO.,LTD.
is recommended for the connector (female type).
Auto switch and the
connector (See Table 1)
Gate seal material
1: FKM
2: Kalrez
Ⓡ
4709
Kalrez
Ⓡ
is a registered trademark of E.
I .du Pont de Nemours and Company or
its affiliates.
50 x 336 mm
Valve type
1
：
Insert type (Without body)
2
：
Cassette type (Standard)
3
：
Cassette type (Half MESC)
Number of axes and seal type:
One axis bellows
Applicable water size:
For 300mm wafer
Parallel seal type slit valve
Opening window size:
End lock
Nil : OPEN/CLOSE
end lock
N
: None
