- 4 -
1. Specifications
Opening size
50mm×336mm
Operating pressure
Atmospheric pressure
～
10
-6
Pa
Pilot pressure
0.45
～
0.6 MPa
Internal leakage
*1
O-Ring Material : FKM
6.5×10
-10
Pa
･
m
3
/sec
O-Ring Material : Kalrez
Ⓡ
6.5×10
-9
Pa
･
m
3
/sec
Internal leakage at Back pressure
*1
〈
Back pressure
0.1MPa(abs) or less
〉
O-Ring Material : FKM
6.5×10
-8
Pa
･
m
3
/sec
O-Ring Material : Kalrez
Ⓡ
6.5×10
-7
Pa
･
m
3
/sec
External Leakage
*1
6.5×10
-11
Pa
･
m
3
/sec
Operating temperature
Gate Part
：
5
～
120
℃
(During bake-out
：
150
℃
)
Actuator part
：
5
～
90
℃
（
Except Auto switch
）
Fluid
Inert gas
Operating Time
1 sec or less
*
２
Auto switch
D-A93
（
Operating temperature
：
20
～
60
℃
）
Main material of
vacuum part
Seal material
FKM
Mechanical
parts
Bellows
：
AM350
Gate
：
A6063
Body
：
A5052
Bonnet
：
A6061
Gate bolt
：
SUS316
Others
：
SUS304
Piping size
Rc1/8
Exhaust direction
Free
End-Lock ( End lock type)
With lock mechanism in opened or FULL sea position
Mounting Direction
Vertical
Cylinder Volume
0.2
ℓ
Mass
・
Insert type
：
10kg
・
Cassette type (Standard)
：
14.5kg
・
Cassette type (Half MESC)
：
13.5kg
*1: At normal temperature. Gas permeation is not included.(SMC's inspection conditions)
*2: The period of time from gate open state to clamp after signals comes to solenoid
valve and from gate clam
＜
Conditions
＞
・
Pressure: 0.5MPa
,
・
Pipe length:1m,
・
Gate Direction: Vertical Upper,
・
Without Speed Controller,
・
Solenoid Valve:SY5120-01
,
・
Tube:TU0604
