2-2
2 Introduction
2.2
Operating Principle
The measurement system is based on the principle of the white-light
interferometer. In one arm of the interferometer, the object is fixed in position
and the interferometer setup is moved relative to the object at a constant
speed. A camera depicts the object. If the optical path lengths between the
reference mirror and the corresponding points on the object are identical, you
receive an interference on the camera chip. Depending on the topography of
the object, interferences are shown on the video camera pixel by pixel during
this measurement run. Once the predefined distance has been traveled
through, the topographical structure of the object is digitally saved. The result
can be shown in two or three dimensions using the TMS software.
Figure 2.2:
Schematic layout of a white-light interferometer
