5 Installation
22
Version: 1.0.1
MP134E
Q-522 Miniature Stage
NOTICE
Warping of the Q-522 due to mounting on uneven surfaces!
Mounting the Q-522 on an uneven surface can warp the Q-522. Warping reduces the
accuracy.
Mount the Q-522 on an even surface. The recommended evenness of the
surface is ≤2 µm.
For applications with great temperature changes:
Only mount the Q-522 on surfaces that have the same or similar thermal
expansion properties as the Q-522.
INFORMATION
The contact of the Q-522 with the protective earth conductor is made as follows:
Two counter-sunk holes in the base body of the Q-522
Suitable conductive screws (p. 13)
Protective earth conductor connected to the surface on which the Q-522 is
mounted
INFORMATION
Observe the applicable standards for mounting the protective earth conductor.
Figure 8: Example Q-522.04z, left: View from below; right: View from top
1
Two locating holes on the bottom side of the stage are used for alignment on a surface.
2
Two M2 screws are used to mount the stage on the surface.
