6
Startup and Operation
33
6.1
General Notes on Startup and Operation ...........................................................33
6.2
Starting Up the Stage .........................................................................................36
6.2.1
Starting Up the Q-522.x0z with the E-870 Drive Electronics ............37
6.2.2
Starting Up the Q-522.x4z with the E-871 Controller .......................39
7
Maintenance
41
7.1
General Notes on Maintenance ..........................................................................41
7.2
Performing a Maintenance Run ..........................................................................41
7.3
Cleaning the Q-522 ............................................................................................41
8
Troubleshooting
43
9
Customer Service
45
10
Technical Data
47
10.1
Specifications......................................................................................................47
10.1.1
Data Table ........................................................................................47
10.1.2
Maximum Ratings .............................................................................49
10.1.3
Ambient Conditions and Classifications ...........................................49
10.2
Operating Time ...................................................................................................50
10.3
Dimensions .........................................................................................................51
10.3.1
Q-522.00z .........................................................................................51
10.3.2
Q-522.0yz .........................................................................................52
10.3.3
Q-522.10z .........................................................................................53
10.3.4
Q-522.1yz .........................................................................................54
10.3.5
Q-522.20z .........................................................................................55
10.3.6
Q-522.2yz .........................................................................................56
10.4
Pin Assignment ...................................................................................................57
10.4.1
Q-522.xy0 (Vacuum-Incompatible) ...................................................57
10.4.2
Q-522.xyU (Vacuum-Compatible) ....................................................58
11
Old Equipment Disposal
59
12
EC Declaration of Conformity
61