PI PIFOC P-725 series, User Manual

Page: 18 / 25

Page 18 / 25
2018-11-13
P725T0010, valid for P-725
Physik Instrumente (PI ) GmbH & Co. KG, Auf der Roemerstr. 1, 76228 Karlsruhe/Germany
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws
P-725.xDD Fast PIFOC High-Dynamics Piezo Scanner
P-725.CDD P-725.SDD Unit Tolerance
Active axes Z Z
Motion and positioning
Integrated sensor Capacitive SGS
Open-loop travel, -20 to +120 V 18 18 µm min. (20 % /
-0 %)
Closed-loop travel 18 18 µm
Open-loop resolution 0.2 0.2 nm typ.
Closed-loop resolution 0.2 0.2 nm typ.
Closed-loop linearity error 0.04 0.5 % typ.
Repeatability ±1.5 ±5 nm typ.
Runout θ
X
,
θ
Y
2 2 µrad typ.
Crosstalk in X, Y 150 150 nm typ.
Mechanical properties
Stiffness in motion direction 1.5 1.5 N/µm ±20 %
Resonant frequency, no load 1180 1180 Hz ±20 %
Resonant frequency, under load, at 200 g 450 450 Hz ±20 %
Push / pull force capacity in motion
direction 100 / 20 100 / 20 N max.
Drive properties
Ceramic type PICMA® P-887 PICMA® P-887
Electrical capacitance 3.1 3.1 µF ±20 %
Dynamic operating current coefficient 19.4 19.4 µA / (Hz
× µm) ±20 %
Miscellaneous
Operating temperature range* -20 to 80 -20 to 80 °C
Material Aluminum Aluminum
Mass 0.21 0.2 kg ±5 %
Cable length 1.5 1.5 m ±10 mm
Sensor / voltage connection Sub-D 7W2 (m) LEMO
*Specifications assured from 17 °C to 23 °C. The piezo scanner has to be recalibrated for temperatures outside
this range.