PI P-5 7 Series, Manual

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10 Technical Data
P-5x7/P-5x8 Positioners PZ82E Version: 3.2.0 37
Subject to change. You can find the latest product specifications on the product web page at
www.pi.ws (https://www.pi.ws).
In this Chapter
Specifications ............................................................................................................................... 37
Ambient Conditions and Classifications ....................................................................................... 41
Dimensions .................................................................................................................................. 42
Torque for Stainless Steel Screws (A2-70) ................................................................................... 45
Pin Assignment ............................................................................................................................ 45
10.1 Specifications
10.1.1 P-5x7 Data Table
Motion P-517.2CL P-517.2CD P-527.2CL P-527.2CD P-517.3CL P-517.3CD P-527.3CL P-527.3CD P-517.RCD P-527.RCD Tolerance
Active axes X, Y X, Y X, Y X, Y X, Y, Z X, Y, Z X, Y, Z X, Y, Z X, Y, θZ X, Y, θZ
Travel range in X 100 µm 100 µm 200 µm 200 µm 100 µm 100 µm 200 µm 200 µm 100 µm 200 µm
Travel range in Y 100 µm 100 µm 200 µm 200 µm 100 µm 100 µm 200 µm 200 µm 100 µm 200 µm
Travel range in X, open loop 130 µm 130 µm 250 µm 250 µm 130 µm 130 µm 250 µm 250 µm 130 µm 250 µm ±20 %
Travel range in Y, open loop 130 µm 130 µm 250 µm 250 µm 130 µm 130 µm 250 µm 250 µm 130 µm 250 µm ±20 %
Linearity error in X 0.03 % 0.03 % 0.03 % 0.03 % 0.03 % 0.03 % 0.03 % 0.03 % 0.03 % 0.03 % typ.
Linearity error in Y 0.03 % 0.03 % 0.03 % 0.03 % 0.03 % 0.03 % 0.03 % 0.03 % 0.03 % 0.03 % typ.
Travel range in Z 20 µm 20 µm 20 µm 20 µm
Travel range in Z, open loop 25 µm 25 µm 25 µm 25 µm ±20 %
Linearity error in Z 0.03 % 0.03 % 0.03 % 0.03 % typ.
Rotation range in θZ 1 mrad 2 mrad
Rotation rang e in θZ, open
loop
2.6 mrad 5 mrad ±20 %
Linearity error in θZ 0.15 % 0.15 % typ.
Positioning P-517.2CL P-517.2CD P-527.2CL P-527.2CD P-517.3CL P-517.3CD P-527.3CL P-527.3CD P-517.RCD P-527.RCD Tolerance
Integrated sensor Capaci-
tive, direct
position
measuring
Capaci-
tive, direct
position
measuring
Capaci-
tive, direct
position
measuring
Capaci-
tive, direct
position
measuring
Capaci-
tive, direct
position
measuring
Capaci-
tive, direct
position
measuring
Capaci-
tive, direct
position
measuring
Capaci-
tive, direct
position
measuring
Capaci-
tive,
indirect
position
measuring
Capaci-
tive,
indirect
position
measuring
System resolution in X 1 nm 1 nm 2 nm 2 nm 1 nm 1 nm 2 nm 2 nm 1 nm 2 nm
System resolution in Y 1 nm 1 nm 2 nm 2 nm 1 nm 1 nm 2 nm 2 nm 1 nm 2 nm
Resolution in X, open loop 0.3 nm 0.3 nm 0.5 nm 0.5 nm 0.3 nm 0.3 nm 0.5 nm 0.5 nm 0.3 nm 0.5 nm typ.
Resolution in Y, open loop 0.3 nm 0.3 nm 0.5 nm 0.5 nm 0.3 nm 0.3 nm 0.5 nm 0.5 nm 0.3 nm 0.5 nm typ.
Bidirectional repeatability in
X
± 5 nm ± 5 nm ± 10 nm ± 10 nm ± 5 nm ± 5 nm ± 10 nm ± 10 nm ± 5 nm ± 10 nm typ.
Bidirectional repeatability in
Y
± 5 nm ± 5 nm ± 10 nm ± 10 nm ± 5 nm ± 5 nm ± 10 nm ± 10 nm ± 5 nm ± 10 nm typ.
System resolution in Z 0.1 nm 0.1 nm 0.1 nm 0.1 nm
Resolution in Z, open loop 0.1 nm 0.1 nm 0.1 nm 0.1 nm typ.
10 Technical Data