3 Product Description
P-5x7/P-5x8 Positioners
PZ82E
Version: 3.2.0
9
In this Chapter
Model Overview ............................................................................................................................. 9
Product View ................................................................................................................................ 10
Scope of Delivery ......................................................................................................................... 11
Suitable Electronics ...................................................................................................................... 11
Accessories ................................................................................................................................... 12
Technical Features ....................................................................................................................... 13
3.1
Model Overview
The following standard versions of the P-5x7/P-5x8 are available:
Model
Description
P-517.2CD
Precision XY nanopositioner, 100 µm × 100 µm, capacitive sensors,
parallel metrology, D-sub connector
P-517.2CL
Precision XY nanopositioner, 100 µm × 100 µm, capacitive sensors,
parallel metrology, LEMO connectors
P-527.2CD
Precision XY nanopositioner, 200 µm × 200 µm, capacitive sensors,
parallel metrology, D-sub connector
P-527.2CL
Precision XY nanopositioner, 200 µm × 200 µm, capacitive sensors,
parallel metrology, LEMO connectors
P-517.3CD
Precision XYZ nanopositioner, 100 µm × 100 µm × 20 µm, capacitive
sensors, parallel metrology, D-sub connector
P-517.3CL
Precision XYZ nanopositioner, 100 µm × 100 µm × 20 µm, capacitive
sensors, parallel metrology, LEMO connectors
P-527.3CD
Precision XYZ nanopositioner, 200 µm × 200 µm × 20 µm, capacitive
sensors, parallel metrology, D-sub connector
P-527.3CL
Precision XYZ nanopositioner, 200 µm × 200 µm × 20 µm, capacitive
sensors, parallel metrology, LEMO connectors
P-517.RCD
Precision XY / rotation nanopositioner, 100 µm × 100 µm, 2 mrad,
capacitive sensors, parallel metrology, D-sub connector
P-527.RCD
Precision XY / rotation nanopositioner, 200 µm × 200 µm, 4 mrad,
capacitive sensors, parallel metrology, D-sub connector
P-558.ZCD
Precision nanopositioning Z stage, 50 µm, direct position measuring,
capacitive sensors, D-sub connector
P-558.ZCL
Precision nanopositioning Z stage, 50 µm, direct position measuring,
capacitive sensors, LEMO connectors
P-518.ZCD
Precision nanopositioning Z stage, 100 µm, direct position measuring,
capacitive sensors, D-sub connector
3
Product Description