NOTICE
Property damage from impermissibly high sealing gas pressure
Excessive sealing gas pressure leads to damage to the seals after switching on the vacuum pump.
► Observe the max. permissible sealing gas pressure.
► Reduce the sealing gas pressure to < 1200 hPa.
► Stop the sealing gas supply immediately after switching off the vacuum pump.
Procedure with clean processes
You can switch off the vacuum pump in every pressure range, between atmospheric pressure and ulti-
mate pressure directly after the process end.
1. Close the shut-off valve in the vacuum line and disconnect the vacuum pump from the process.
2. Switch off the vacuum pump.
3. Vent the vacuum pump via the intake side.
4. Make sure that you do not vent the vacuum chambers through the vacuum pump.
5. Switch off the process- and pump-specific media supply (e.g. the sealing gas supply).
Procedure with contaminated medium
With media that heavily contaminate the suction chamber, flush the suction chamber with air or nitrogen
at the end of the process.
1. Close the shut-off valve in the vacuum line and disconnect the vacuum pump from the process.
2. At the end of the process, continue to operate the vacuum pump with flushing gas supply at the
vacuum flange for another approx. 20 to 40 minutes.
3. Then stop the flushing gas supply.
4. Switch off the vacuum pump.
5. Vent the vacuum pump via the intake side.
6. Make sure that you do not vent the vacuum chambers through the vacuum pump.
7. Switch off the process- and pump-specific media supply (e.g. the sealing gas supply).
Operation
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