Table of contents
1
1.1
1.1.1 Applicable documents
1.1.2 Variants
1.2
1.3
1.3.1 Instructions in the text
1.3.2 Pictographs
1.3.3 Stickers on the product
1.3.4 Abbreviations
1.4
2
2.1
2.2
2.3
2.4
ATEX classification and safety measures
2.4.1 Labeling of the vacuum pump
2.4.2 Potential hazards
2.4.3 Safety measures
2.5
2.6
2.7
3
3.1
3.2
3.3
4
4.1
4.2
5
5.1
5.2
5.3
5.4
5.5
Connecting the fore-vacuum side
5.6
Setting and checking the temperature monitoring
5.6.1 Check thermometer installation dimension
5.6.2 Arrange a signal evaluation for the thermometer
5.7
5.7.1 Connect three phase motor with 6-pin terminal board
5.7.2 Checking the direction of rotation
5.7.3 Connecting the PTC thermistor tripping unit
5.8
6
6.1
Putting the vacuum pump into operation
6.2
Operation with frequency converter
6.2.1 Observe the voltage slew rate
6.2.2 Observe the mechanical resonance
6.3
6.4
Adjusting the sealing gas amount
6.5
6.6
Table of contents
3/60