10
2
8
6
4
2
10
1
8
6
4
2
10
0
8
6
4
2
10
–1
8
6
4
2
10
–2
8
6
4
2
10
–3
10
–3
2
4
6
10
–2
2
4
6
10
–1
2
4
6
10
0
2
4
6
10
1
2
4
6
10
2
H
2
He
Ne
Xe
Kr
Ar
CO
2
Freon 12
Air
O
2
CO
N
2
p [hPa]
p
eff
[hPa]
Water vapor
Fig. 16:
Displayed pressure
Within the pressure range < 1 hPa, the display is linear.
Set calibration factor at electronic drive unit
► Use
[P:742]
to enter calibration factor and correct displayed measured value.
Alternatively: Calculating pressure for gases other than air
1. Set the calibration factor in the electronic drive unit to 1.
2. Calculate the effective pressure using the following formula:
P
eff
= C × p
●
P
eff
= Effective pressure
●
C
= Calibration factor of the gas to be measured
●
p
= Displayed pressure (gauge calibrated for air)
8.8 Operating with gas ballast
WARNING
Risk of injury from reactive, potentially explosive or otherwise hazardous gas/air mixtures
Uncontrolled gas inlet of air or gases containing oxygen may lead to the formation of potentially ex-
plosive gas/air mixtures in the vacuum system. Ignition can cause very serious injuries.
► Use inert gases only for the supply of ballast gas in order to prevent the formation of a potentially
explosive atmosphere.
► Ensure a closed inert gas system in order to avoid zone entrainment as a result of process gas
entering into the inert gas line.
Operation
48/84
Summary of Contents for HISCROLL 12
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