Pfeiffer Vacuum HiPace 800 P Operating Instructions Manual Download | Manualshive

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Operating Instructions

EN

P

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03

19

BEN/

F

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1211

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HiPace 800 P

Turbopump

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Summary of Contents for HiPace 800 P

Page 1: ...Translation of the original instructions Operating Instructions EN PT 0319 BEN F 1211 HiPace 800 P Turbopump...

Page 2: ...on 23 6 1 Commissioning 23 6 2 Operation modes 23 6 3 Function description 23 6 4 Monitoring of the operation conditions 24 6 5 Switching off and venting 25 7 Maintenance replacement 26 7 1 Maintenanc...

Page 3: ...m operating instructions are the result of risk evaluations and hazard analyses and are oriented on international certification stan dards as specified by UL CSA ANSI Z 535 SEMI S1 ISO 3864 and DIN 48...

Page 4: ...acuum flange Fore vacuum flange Electric connection Cooling water connection Venting connection Sealing gas connection Prohibition of an action or activity in connection with a source of danger the di...

Page 5: ...ance of connected devices are described in detail in the operating instructions of the individual components For information on order numbers of components see Accessories Use original accessory parts...

Page 6: ...s vacuum pumps components or operating fluids can be con taminated by toxic reactive or radioactive substances Wear adequate protective equipment during maintenance and repairs or in case of reinstall...

Page 7: ...ure operation of the devices in areas with ionizing radiation operation in potentially explosive areas use of the devices in systems in which impact like stress and vibrations or periodically forces a...

Page 8: ...ore connection Keep the original protective covers Always transport the turbopump in an upright position 3 2 Storage Close the flange openings by using the original protective covers Close further con...

Page 9: ...information from the rating plate available Fig 1 Example for a rating plate Scope of delivery HiPace 800 P with TC 400 and 48 V DC 5 Mating plug for the connection remote on the TC 400 type dependent...

Page 10: ...s the drive power au tomatically Depending on the application and the HiPace different cooling variants are selectable Rotor bearing Hybrid bearing TurboDrag pump High vacuum side maintenance free per...

Page 11: ...ic field 6 mT Overvoltage category II Connection voltage electronic drive unit depending on the variant 48 V DC 5 Remarks to ambient conditions The specified permissible ambient temperatures apply to...

Page 12: ...time All flange components must be grease free dust free and dry at installation The operating fluid reservoir is already installed and filled for the turbopump HiPace 800 P Earthquake safety An eart...

Page 13: ...acuum flange should always point vertically downward 25 Fig 4 Recommended orientation of the fore vacuum flange The maximum axial loading capacity of the high vacuum flange is 1000 N equals 100 kg A o...

Page 14: ...eiffer Vacuum accessories programme protection screen or splinter shield are optionally Hexagon screw and blind hole Mind that the sealing surfaces are not damaged Connect the flanges according to the...

Page 15: ...unting kit of the Pfeiffer Vacuum accessories programme A copper seal protection screen or splinter shield are optionally Stud screw and blind hole If used Insert protective screen or splinter shield...

Page 16: ...voltage of the turbopump is valid Switch off switch S1 on the power pack position 0 Insert the connection cable with the socket in the connection DC in on the electronic drive unit and close the bayon...

Page 17: ...ffer Vacuum range of accessories Connect the adapter to the appropriate red coded connection on the TC 400 Settings can be made via the interfaces of the TC 400 remote RS 485 Profibus or DeviceNet Ove...

Page 18: ...sh the mains supply for the relay box according to the accessory operating in structions Make sure the supply voltage for the backing pump is valid WARNING Damage to health due to poisonous gases Proc...

Page 19: ...case of shut down or power failure The permissible connection pressure is max 150 kPa absolute Unscrew the venting screw with seal ring from the venting connection Screw in the venting valve with sea...

Page 20: ...Observe the tightening torque for the fixing screw Tightening torques for fixing screws of heating jackets Plug in and fix the accessory s control lead to the corresponding accessory connection port...

Page 21: ...e amounts 17 5 20 sccm for the HiPace 800 P Sealing gas supply with control valve Unscrew the locking screw with seal ring out of the sealing gas connection Screw the sealing gas valve with seal ring...

Page 22: ...ng water connection Socket connection Hose lines External diameter 8 mm Internal diameter 6 mm Cooling water quality filtrated mechanically clean optically clear no turbidity no sediments chemical ly...

Page 23: ...tion without operating unit Operation via remote connection Operation via RS 485 and Pfeiffer Vacuum display and control units or PC Operation via field bus 6 3 Function description Operation without...

Page 24: ...he DCU 400 Settings are possible via the RS 485 by using DCU HPU or PC Operation via field bus Integrating and operating Pfeiffer Vacuum turbopumps in the customer s field bus system is possible for e...

Page 25: ...tions of the electronic drive unit Settings are possible via the RS 485 by using DCU HPU or PC 1 When mains power is restored the venting procedure is aborted Basic information for the rapid venting V...

Page 26: ...id by pumped media is possible Poisoning hazard through contact with materials that damage health In the case of contamination carry out appropriate safety precautions in order to pre vent danger to h...

Page 27: ...cloth Do not use any cleaning fluids Using tweezers insert new Porex rods 9 pieces Insert the new operating fluid reservoir with its felt side towards the splash nut into the bearing mounting For the...

Page 28: ...of a redundant safety system for avoiding excess rotation speeds Adjust the parameter P 777 according to the pump type Alternatively If no display and control unit is available please use the SpeedCon...

Page 29: ...ve Pfeiffer Vacuum Service clean the turbopump completely If necessary have the bearings replaced Take into account the total running time Change the operating fluid reservoir Installation and commiss...

Page 30: ...via interface RS 485 Please refer to operating instructions of the electronic drive unit Voltage drop in the cable too high Use a suitable cable Pump does not attain the final rotational speed within...

Page 31: ...0 l s Leave electronic drive on the pump Close the flange openings by using the original protective covers If possible send pump or unit in the original packaging Sending of contaminated pumps or devi...

Page 32: ...te when ordering accessories or spare parts Item Designation Size Order number Notes Pieces Order qty 7 Operating fluid reservoir PM 143 452 T incl Porex rods 1 8 Electronic drive unit TC 400 accordin...

Page 33: ...PM 061 371 T Backing pump relay box single phase 5 A for TC 400 1200 and TM 3000 PM 061 374 T PM 061 374 T PM 061 374 T Backing pump relay box single phase 20 A for TC 400 1200 TCP 350 and TM 3000 PM...

Page 34: ...F F PM 016 687 T Set of stud screws for trough hole DN 200 CF F PM 016 688 T Set of stud screws for trough hole DN 200 CF F PM 016 736 T Mounting kit for HiPace 1200 and HiPace 1800 DN 200 ISO F inclu...

Page 35: ...1 Pa 1 N m2 mbar l s Pa m3 s sccm Torr l s atm cm3 s mbar l s 1 0 1 59 2 0 75 0 987 Pa m3 s 10 1 592 7 5 9 87 sccm 1 69 10 2 1 69 10 2 1 1 27 10 2 1 67 10 2 Torr l s 1 33 1 33 78 9 1 1 32 atm cm3 s 1...

Page 36: ...level 50 dB A 50 dB A 50 dB A Relative humidity of air 5 85 non condensing 5 85 non condensing 5 85 non condensing Protection category IP 54 IP 54 IP 54 Connection pressure max for venting sealing ga...

Page 37: ...130 131 203 5 212 179 5 148 181 45 45 1 1 7 150 208 59 16 7 30 M8 6x DN 25 ISO KF G 1 4 8 145 5 DN 200 ISO K 150 208 59 16 7 M8 6x 8 145 5 181 131 148 179 5 212 203 5 DN 200 ISO F HV DN 25 ISO KF G 1...

Page 38: ...ive Elec tromagnetic Compatibility 2004 108 EC The agent responsible for compiling the technical documentation is Mr J rg Stanzel Pfeiffer Vacuum GmbH Berliner Stra e 43 35614 A lar HiPace 800 P Guide...

Page 39: ...e the only supplier of vacuum technology that provides a complete product portfolio Benefit from our know how and our portfolio of training opportunities We can support you with your plant layout and...

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