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Page 4-4
193C-E-OMA04-A01-01
4-3
Mask Cleaning
This is used to clean mask.
1
Press Mask cleaning in Production config menu while holding
UNLOCK
on
operating panel.
2
Press a button of the command you want to execute while holding
UNLOCK
on operating panel.
UNLOCK
+ Mask cleaning
E.g.)
UNLOCK
+ Cleaning 1 round
UNLOCK
+
Cleaning 1 round
----- One-round cleaning is carried out.
UNLOCK
+
Cleaning 2 round
----- Two-round cleaning is carried out.
Wet cleaning is carried out in this mode.
But this can be used only when the data is set.
UNLOCK
+
Escape XY-table
----- X-Y table retracts to the inner side. This is used to clean the back
of mask by hand.
UNLOCK
+ Send out air of solvent ----- This is used to bleed cleaning solvent of air.
Summary of Contents for KXF-193C
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