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Engineering Data (Typical)
124
ZX2 User’s Manual
INTRODUCTION
MAIN
APPLICATIONS
& SETTING
METHODS
SPECIFI-
CATIONS
INDEX
SETTING
TRANSITION
CHARTS
DETAILED
SETTINGS
FLOW OF
OPERATION
CONTENTS
PREPARATION
FOR
MEASUREMENT
BASIC
SETUP
TROUBLE-
SHOOTING
Height
Double
Sheet
Detection
Positioning
Eccentricity
and Surface
Deflection
Steps
and
Warpage
Thickness
Beam Size
Spot Beams
ZX2-LD50
ZX2-LD100
Line Beams
ZX2-LD50L
ZX2-LD100L
L
+10 mm
0 mm
-4 mm
-10 mm
X
Approx.
600 µm
Approx.
160 µm
Approx.
40 µm
Approx.
220 µm
Y
Approx.
350 µm
Approx.
90 µm
Approx.
60 µm
Approx.
130 µm
L
+35 mm
0 mm
-20 mm
-35 mm
X
Approx.
1.1 mm
Approx.
400 µm
Approx.
70 µm
Approx.
250 µm
Y
Approx.
550 µm
Approx.
190 µm
Approx.
110 µm
Approx.
150 µm
Y
X
L
Beam cross-section
L
+10 mm
0 mm
-4 mm
-10 mm
X
Approx.
2.6 mm
Approx.
2.6 mm
Approx.
2.6 mm
Approx.
2.6 mm
Y
Approx.
350 µm
Approx.
90 µm
Approx.
60 µm
Approx.
130 µm
L
+35 mm
0 mm
-20 mm
-35 mm
X
Approx.
2.1 mm
Approx.
2.5 mm
Approx.
2.7 mm
Approx.
2.9 mm
Y
Approx.
550 µm
Approx.
190 µm
Approx.
110 µm
Approx.
150 µm
Y
X
L
Beam cross-section
Note. L: Measurement distance displayed on the Amplifier Unit (For the
measurement distance displayed on the Amplifier Unit, the
measurement center distance is displayed as 0, and the NEAR and
FAR sides from the sensor are displayed by + and -, respectively.)