Olympus AL120-12 Series, Maintenance Manual

Page: 54 / 68

Test Programs Maintenance Manual
3-26
Page
No. 22
Button
operation
check
<Button motion check>
This program can be used to check the operation button motions.
Press the [Start] button.
・
 Press a button with an LED, and the LED lights up on the pressed button.
・
 Press the All/Sampling button, and all the LEDs light up.
・
 Press the menu buttons [M1] to [M4] on the liquid crystal panel, and [M1] to [M4] appear on the
liquid crystal panel.
・
 When the 4-way button on the liquid crystal panel is pressed, [UP], [DOWN], [LEFT] or [RIGHT]
corresponding to the button pressed is displayed on the liquid crystal panel.
・
 When the [wafer alignment ] control is manipulated, [Top], [Right], [Bottom] or [Left] corresponding
to the set position is displayed on the liquid crystal panel.
・
 When the [Inspection time] control is manipulated, the inspection time corresponding to the set
inspection time is displayed on the liquid crystal panel.
・
 When the [Top macro spin direction control] is manipulated, [CCW], [Cancel] or [CW] corresponding
to the set rotation is displayed on the liquid crystal panel.
・

When the remote control buttons are manipulated, [Remote start], [Remote Unload], [Remote
Micro] or [Remote Macro] corresponding to the settings is displayed on the liquid crystal panel.
・
 Press the [Quit] button, and the loader returns to its initial state and stops the operation.
No. 23
Sensor
and
button
check
<Sensor and button input check>
This program can be used to check the sensor input states.
Press the [Start] button.
・
 The LEDs on the Wafer No. selector buttons light up in accordance with the sensor input states.
・
 The list of sensors is displayed on the liquid crystal panel.
・
 Use the menu buttons [M1], [M2] [M3]and [M4] to switch the sensors to check.
・
 Press the [Quit] button, and the loader returns to its initial state and stops the operation.
M1 M2 M3 M4
1
A front/back cassette position sensor
<AL cst> U205
AL120-LMB12-F lower-limit sensor
<E low> U104
E step-out sensor
<E out2> U105
2 A front/back standby position sensor
<AL mid> U206
Horizontal origin sensor
<E limit> U101
E step-out sensor
<E out1> U106
3
A front/back macro position sensor
<AL macro> U207
Horizontal mapping position sensor
<E map> U102
A step-out sensor
<A out2> U019
4
A vertical upper-limit sensor
<A up> U201
Horizontal stop position sensor<E
out> U103
A step-out sensor #2
<A out1> U019
5
A vertical transfer position sensor
<A mid> U202
L-arm rotation origin sensor
＜
L rotate> S101
-
6
A vertical lower-limit sensor
<A low> U203
L vertical upper-limit sensor
<L up> S101
7 A side-to-side origin sensor
<A LR org> U208
L vertical transfer position sensor
<L mid>
8
L vertical lower-limit sensor
<L low>
Macro table rotation motor driver
MO <M MO>
9
Cassette switch #
１
<Caseet> S101
Macro table rotation motor driver
TSD <M TSD>
10
Cassette switch #
１
<Caseet> S102
A-arm rotation motor driver MO
<AR MO>
11
Cassette switch #
１
<Caseet> S103
A-arm rotation motor driver TSD
<AR TSD>
12
Cassette switch #
１
<Caseet> S104
A-arm horizontal motor driver MO
<AL MO>
13 A-arm horizontal motor driver TSD
<AL TSD>
14
Window open/close sensor
<W close>U701
A-arm vertical motor driver MO
<AUP MO>
15
Window lock
<WL close> U702
A-arm vertical motor driver TSD
<AUP TSD>
16 Window unlock
<WL open> U703
17
F horizontal macro position sensor
<FL macro> U505
L reverse rotation switch
<L SW BK>
18
F horizontal middle position sensor
<FL mid>U506
L rotation switch
<L SW FOR>
19 F horizontal stage position sensor
<FL stage> U507
L position registration switch
<L set1>
20
F vertical upper-limit sensor
<F up> U501
21
F vertical middle point sensor
<F mid>U502
Macro table upper-limit sensor
<M up>
L-arm rotation motor driver MO
<L MO>
22
F vertical lower-limit sensor
<F low> U503
Macro table lower-limit sensor
<M low>
L-arm rotation motor driver TSD
<L TSD>
23
<FUP vcm>
Wafer sensor vertical motor driver
TSD <E TSD>