Olympus AL120-12 Series, Maintenance Manual

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Maintenance Manual Test Programs
3-1
Page
3 Test Programs
Test programs are used to check and adjust the functions of each unit.
Before initiating these programs, pay special attention to interference with the other units and make sure that
there are no wafers left over from previous operations.
1 How to Use the Programs
1. Turn the main switch OFF.
2. Turn the main switch ON, while pressing the Wafer No. selector buttons [1] and [2].
If there is a wafer on the table or arm, a warning is displayed and the vacuum is maintained.
Press the [Start] button to turn the vacuum OFF. Use wafer tweezers to prevent the wafer from falling.
3. Select a test number with a Wafer No. selector button.
4. Press the [Start] button to initiate the test.
The menu appears on the liquid crystal panel. Select specific items in the menu by manipulating the menu
buttons, 4-way buttons, [Wafer No.] buttons, etc.
5. Press the [Quit] button to terminate the test. (The loader enters the state in step 3.)
6. Turn the main switch OFF to terminate all the tests.
Liquid crystal panel
4-way button [UP]
4-way button [DOWN]
4-way button [LEFT]
4-way button [RIGHT]
Menu buttons
[M1]
～
[M4]
Quit button
Start button
Wafer No.
selector buttons