Olympus AL120-12 Series, Maintenance Manual

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Operation/Maintenance Manual
Introduction
i-1 Page
i Introduction
AL120 Series Lineup
This product is an auto loader to transfer the wafer from the cassette to the microscope. The macro
observation is available while transferring wafers.
AL120 series products consist of a model name and an applicable wafer size.
Note that only the AL120 series products with the same wafer size can be combined.
(The remote controller is common to all the AL120 series products.)
AL120 series
Stage
The AL120 series consists of a wafer loader, a vacuum stage, and other products.
This manual does not cover custom-order specifications or microscopes.
To acquire a comprehensive understanding of both your loader and microscope, please refer to your
microscope operation manual.
Please prepare the cassettes and wafers at your side.
Wafer Loader
AL120-LMB12-F
AL120-LMB12-LP3
Option
Microscope
MX61L
MX63L
Vacuum Stage
AL120-VS12
Option
Remote Controller
AL120-RC
Series name
Model name Wafer size
Cassette type
LMB AL120-
LMB : Type of
Wafer Loader
12 -LP3
-F
：
FOSB specification
-LP3
：
FOUP opener specification
Series name
Model name Wafer size
VS AL120- 12