Oerlikon Leybold Vacuum 960 862, Operating Instructions Manual

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50 GA02319_002_03 - 07/2007 - © Oerlikon Leybold Vacuum
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Spare parts
Pos. Qty Specification Dimensions Material Ref, No, Notes
(mm)
92 1 RACE BUSHING 50X60X28 9 714 25 950
●
93 1 FRONT END PLATE 9 714 24 010
94 1 BALL BEARING 6309 C3 D100XD45X25 9 714 25 960
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95 1 SPRING RING 6309 9 714 25 970
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96 2 O-RING 123 X 3 FKM 712 37 100
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97 1 FRONT COVER 9 714 25 980
98 2 SHAFT SEAL (SET) DN60X80X7 714 03 120
●
100 2 LIFTING LUG 9 714 32 640
101 1 INLET FLANGE 9 714 23 990
102 3 PLUG R1/4 714 07 710
103 1 ANTISUCKBACK VALVE 9 714 37 830
●
104 2 RING 714 05 890
105 1 SPRING 9 714 25 990
● ●
106 2 O-RING 380,37X5,33 FKM 712 37 500
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107 4 VALVE STOP 9 714 25 920
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108 2 VALVE PLATE 9 714 25 900
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109 2 VALVE PLATE 9 714 25 910
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110 14 PIN M10-25/15J=15 V21 00 526
111 6 PIN M12-50/35J=24 V21 13 645
112 1 THERMALSWITCH 9 714 30 630
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112 1 THERMALSWITCH 9 714 40 000
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113 1 GAS BALLAST CONTROL ROD 9 714 26 080
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114 1 ELASTIC PIN V22 00 112
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115 1 GBCONTROL GUIDE 9 714 26 090
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116 2 O-RING 304.17X5.33 FKM 9 714 24 620
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117 1 GAS BALLAST SPRING 714 17 990
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118 2 O-RING 278.77X5.33 FKM 9 714 24 610
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119 1 GASBALLAST VENTIL 9 714 26 060
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120 1 O-RING 10.77X2.62 712 37 320
● ●
121 1 O-RING 4.42X2.62 FKM 9 714 24 460
● ●
122 1 PLUG G 1 710 73 040
123 2 O-RING 33 X 3.5 FKM 712 17 410
● ●
124 1 GAS BALLAST FRAME 9 714 26 120
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124 1 GAS BALLAST FRAME 9 714 32 010
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125 1 GAS BALLAST TUBE G3/4 9 714 32 560
126 1 ELBOW G3/4 710 78 760
127 1 PAPER FILTER 710 38 200
● ●
128 1 GAS BALLAST R3/4 9 714 37 800
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129 1 GAS BALLAST SUPPORT 9 714 26 130
130 1 GAS BALLAST MEMBRAN 9 714 26 150
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131 1 O-RING 25.07 X 2.62 FKM 9 714 30 800
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132 1 TUBE 9 714 33 950
133 1 CONNECTION ELEMENT G1/2 D18 714 03 890
134 2 TAPERED PIN 10X45 9 714 30 520
135 1 SCREW 9 714 24 710
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136 1 REAR COVER 9 714 25 940
137 1 RACE BUSHING 9 714 25 930
138 1 SPRING RING 714 03 190
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139 1 BALL BEARING D120XD45X29 714 03 880
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140 2 TAPERED PIN 710 37 890