Oerlikon Leybold Vacuum 960 862, Operating Instructions Manual

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35 GA02319_002_03 - 07/2007 - © Oerlikon Leybold Vacuum
F. Checking the anti suckback valve
SV630 B Standard version - SV750 B
Tools required :
■
Tubular box wrench 19 mm.
First remove the intake line and the intake flange (42 or 67).
Remove the 4 screws and take off the intake port.
Remove the anti-suckback valve (103 and 105), the spring and the gasket.
Clean all parts and check that they are in perfect condition ; if not, replace
them.
If the anti-suckback valve closes too early, carefully compress the spring
slightly. The top edge of the valve should be about 1 mm away from the top
side of the intake port.
Reassemble in the reverse order.
Never mount used seals ; always mount new seals.
SV 630 BF
Anti-suckback valve is driven by a EM Valve 24 V DC.
G. Cleaning the gas ballast intake filter
When the pump operates with open gas ballast valve, clean the filter (127)
once a month.
Release the clips on the gas ballast filter. Clean the filter using a suitable
solvent. Then dry it. Reassemble in the reverse sequence.
H. Checking the float Valve
Tools required :
■
Tubular box wrench SW16.
■
Alen keys 4,6.
If the pressure does not fall below approx. 5 mbar (4 Torr) during pump
operation, check the tightness of the float valve (172).
Remove the cover (22) by unscrewing the nuts (11) and remove the seal
(106).
Remove the exhaust deflector (162) by unscrewing the bolt (9).
Remove the clip (173) and pull out the float valve (172).
Take off the gasket, clean the nozzle, check the tightness of the float valve.
Check the gaskets of the float-valve and replace them if required.
Reassemble the float-valve in reverse sequence.
Tighten the demister support units (165) and the exhaust deflector (162). If
necessary mount a new seal (106) and mount the cover (22).
Maintenance
Caution