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36
GA02319_002_03 - 07/2007 - © Oerlikon Leybold Vacuum
Maintenance
Depending on the process involved, dangerous substances may escape
from the pump and oil. Take the appropriate precautions.
Observe the safety regulations.
Never mount used seals ; always mount new seals.
When disposing of used oil please observe the relevant environmental
regulations !
I. Replacing the exhaust valves
Required tools:
■
Tubular box wrench SW16.
Remove the hood (48) by unscrewing the screws (26).
Remove the rubber mounts (44) and the screws (9).
Remove the cover (22) and the gasket (106).
By removing the nuts (11), it is possible to dismount the valve stop and valve
plates (107, 108 & 109).
Replace these elements if required.
Reassemble the valve stop and valve plates (107, 108 & 109) in reverse
sequence.
Depending on the process involved, dangerous substances may escape
from the pump and oil. Take the appropriate precautions.
Observe the safety regulations.
Never mount used seals ; always mount new seals.
When disposing of used oil please observe the relevant environmental
regulations !
J. Replacing the pump module
Fully assembled pump modules are available under Ref. Nos. :
SV630 B / SV 630 BF: 9 714 37 330, SV 750 B: upon request
Consult Oerlikon Leybold Vacuum.
Depending on the process involved, dangerous substances may escape
from the pump and oil. Take the appropriate precautions.
Observe the safety regulations.
Never mount used seals ; always mount new seals.
When disposing of used oil please observe the relevant environmental
regulations !
Warning
Note
Warning
Note
Warning
Note
Summary of Contents for 960 862
Page 17: ...17 GA02319_002_03 07 2007 Oerlikon Leybold Vacuum Description fig 4 ...
Page 43: ...43 GA02319_002_03 07 2007 Oerlikon Leybold Vacuum Spare parts DIRECTION OF ROTATION fig 10 ...
Page 44: ...44 GA02319_002_03 07 2007 Oerlikon Leybold Vacuum Spare parts DIRECTION OF ROTATION fig 11 ...
Page 45: ...45 GA02319_002_03 07 2007 Oerlikon Leybold Vacuum Spare parts fig 12 ...
Page 46: ...46 GA02319_002_03 07 2007 Oerlikon Leybold Vacuum Spare parts fig 13 ...
Page 47: ...47 GA02319_002_03 07 2007 Oerlikon Leybold Vacuum Spare parts fig 14 ...
Page 52: ...52 GA02319_002_03 07 2007 Oerlikon Leybold Vacuum ...
Page 54: ...54 GA02319_002_03 07 2007 Oerlikon Leybold Vacuum Notes ...
Page 55: ...55 GA02319_002_03 07 2007 Oerlikon Leybold Vacuum Notes ...