10
TOP
SRW03 x 2
A
B
E02
M63
M20
C
SRW25 x 2
M09
31. Stick the filament tape C (15
x 10mm) [P/N 92203967] to
Corner B of the inlet mount-
ing part A, just like the tape
covers this portion.
32. Put the barrier M09 on the
inlet ASSY E02, and mount
it by means of the two
screws SRW25.
(Caution)
The barrier shall be posi-
tioned so that its bent part
faces upwards.
33. Mount the inlet cover M63
on the inlet ASSY, using
the two screws SRW03.
34. Stick the gasket M20 to the
inlet cover.
Summary of Contents for PlasmaSync 50MP1
Page 1: ...USE THIS SERVICE MANUAL WHEN SERVICING Model PLA 50V1 ...
Page 10: ...PlasmaSync Plasma Monitor User s Manual NEC Technologies ...
Page 64: ...TROUBLESHOOTING 4 1 ...
Page 80: ...METHOD OF ADJUSTMENTS 5 1 ...
Page 98: ...CIRCUIT DESCRIPTION 6 1 ...
Page 113: ...METHOD OF DISASSEMBLY 7 1 ...
Page 134: ...PACKAGING 8 1 ...
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Page 147: ...PART LIST 9 1 ...
Page 158: ...CONNECTION DIAGRAMS 10 1 ...
Page 160: ...BLOCK DIAGRAMS 11 1 ...
Page 163: ...SCHEMATIC DIAGRAMS 12 1 ...
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