MKS PR 4000 F, Instruction Manual

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Chapter 4: Operation PR4000F
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c. SLAVE If one channel is configurated as a slave then the other channel of
the unit becomes automatically the master of this slave. The
slave’s setpoint is derived from the actual signal of the master. This
enables configurations of gas mixing systems with fixed ratio, e.g.
for supplying gas burners, deposition purposes etc.
An example is given in the SETUP section.
Combinations of these modes are possible.
4.7 Operation with flow meters
For the use with mass flow meters it is recommended to simplify the setup settings by using the
default configuration for flow
DEFAULT F : All flow readouts will be set to sccm, all analog inputs
and outputs set to 5 V . Most (if not all) parameters to be edited are set to standard values but
should be checked anyway. See the table in appendix C for all default settings. Change the setup
settings where needed.
Always check the correct setting of parameter GAIN to consider the right gas correction factor!
Because flow meters do not require setpoint signals one could use only display 1 for both flow
readouts FL1 and FL2.
4.8 Operation with pressure controllers
This operation mode mainly affects in line pressure controllers from von MKS Instruments, e.g. the
types 640, 641 or 649. In general the above given instructions for mass flow controllers apply also
here. In some cases the pressure controllers are configured for different voltage input/output
signals, therefore check carefully the conformity of both the controller and the PR4000F.
Note The setpoint voltage will be applied only to channels which have been
pre-selected with the valve switch
VLV1 or VLV2.