MKS MKSINST IE1000A, Instruction Manual

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Monitor Mode Chapter Five: Diagnostic Interface Setup, Configuration, and
Operation
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Figure 16: IE1000A Embedded Interface (Monitor Mode / Plot Page)
Monitor Mode / Diagnostics Page
The Monitor Mode / Diagnostics Page consists of two sections: (1) Device Diagnostics and (2) Snapshot.
In the “Device Diagnostics” section, the user can execute basic diagnostic tests on the flow and temperature
circuits within the MFC either individually or all at once.
In the “Snapshot” section, the user can acquire device setup data that will allow MKS to diagnose a device
problem remotely. Both of these sections are explained in detail below.
Monitor Mode / Diagnostics Page / Device Diagnostics
The tests listed in this section are designed to insure that there are no major electrical problems and that the
sensors are working properly. These tests are described in detail below:
Raw Flow

The Raw Flow diagnostic test verifies that the flow sensor and the electronics are working
properly.
To run this test, select the “Raw Flow” checkbox, and then press the “Run the Test” button.
When the test finishes, the test result “Pass” or “Fail” will be displayed next to the
checkbox. If the test passes, then the flow circuit is good. If it fails, then there may be a
problem.
Temperature

The Temperature diagnostic test verifies that the temperature sensor and the electronics are
working properly.