MKS MKSINST IE1000A, Instruction Manual

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Monitor Mode Chapter Five: Diagnostic Interface Setup, Configuration, and
Operation
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Monitor Mode
“Monitor Mode” allows the user to monitor the IE500A / IE1000A High Flow Rate Mass Flow Controller’s
performance. In order to configure the mass flow controller, (which includes zeroing the device, changing IP
addresses, and creating new process gases), the “Setup” mode should be used.
Each of the pages in Monitor Mode are listed and described below in detail.
Monitor Mode / Device Page
The Monitor Mode / Device Page displays the general information for the MFC including the currently
selected process gas instance, SEMI gas number, calibration gas, minimum and maximum full scale flows
allowed for that process gas, and the MFC’s current programmed full scale flow rate for the current process
gas.
Note
The IE500A / IE1000A’s model number and serial number can always be found in the bottom
left-hand corner of the browser window.
The figure below shows a screen capture of the Monitor Mode / Device Page for the MFC.
Figure 15: IE1000A Embedded Interface (Monitor Mode / Device Page)