Customer Support
Chapter Four: Maintenance and Troubleshooting
36
Customer Support
Standard maintenance and repair services are available through all of the regional MKS Calibration and
Service Centers.
If any difficulties arise in the use of your device, or to obtain information about companion products MKS
offers, contact any authorized MKS Calibration and Service Center. If it is necessary to return the instrument
to MKS, then two actions must be completed before shipping: (1) a RMA (Return Material Authorization)
number must be obtained and (2) a Health and Safety Form must be completed and included with the
instrument.
Warning
All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or
toxic materials.
Obtaining a Return Material Authorization (RMA) Number
RMA (Return Material Authorization) numbers expedite handling and ensure proper servicing of your
instrument.
RMA numbers can be obtained by contacting the MKS Calibration and Service Center or through the MKS
website at:
http://www.mksinst.com/service/servicehowtoorder.aspx
Note
Returned instruments will not be accepted without a valid RMA number displayed on the
shipping container.
Health and Safety Form
A returned instrument will not be examined without a signed Health and Safety form indicating that the unit is
free of harmful materials.
The Health and Safety form can be obtained on the last page of this manual or through the MKS website at:
http://www.mksinst.com/service/servicehowtoorder.aspx
Note
Returned instruments will not be examined without a signed certificate indicating the
instruments are free of harmful materials.
Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers.
Repair
Contact any authorized MKS Sales Office or Calibration and Service Center should you encounter any
difficulties or problems using your MKS IE1000A High Flow Rate Mass Flow Controller.
Note
If it is necessary to return the instrument to MKS for repair, please contact any of the MKS
international service/calibration centers listed on the inside of the back cover of this manual for
an RMA (Return Material Authorization) number to expedite handling and ensure proper
servicing of your instrument.
Summary of Contents for MKSINST IE1000A
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Page 75: ...Appendix C Health and Safety Form Model Code Description 67 Appendix C Health and Safety Form...