Repair
Chapter Six: Maintenance
36
5. Turn the screw counter clockwise again, 30° at a time, until a leak is just detectable.
6. Turn the screw back in,
1
/
3
of a turn, and verify that no leakage exists.
7. If a leak is still present, continue to turn the adjustment screw as described in the
previous steps.
Caution
This adjustment is delicate and any more than ±1½ turns from
nominal (factory setting) will be excessive.
8. As a final check, the voltage level at pin J (pin 1, Type “D” connector) can be used to
indicate the proper working condition of the valve. Set a command signal of 5 VDC to
give 100% of F. S. The voltage level at pin J (pin 1, Type “D” connector) should be
between 0 and +5.0 VDC during control.
Repair
Contact any authorized MKS Sales Office or Calibration and Service Center should you
encounter any difficulties or problems using your flow controller.
Note
If you must return the instrument to MKS for repair, please contact any of
the MKS service and calibration centers listed on the inside back cover of
this manual, for an ERA (Equipment Return Authorization) number to
expedite handling and ensure proper servicing of your instrument.
Warning
All returns to MKS Instruments must be free of harmful,
corrosive, radioactive, or toxic materials.
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