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MKS Mass-Flo 1159B Manual Download Page 2

111155-P1

Rev K, 10/96

Instruction Manual

MKS Mass-Flo

®

 Controller

Types 1159B/2159B,

1160B/2160B, 1162B/2162B, 1163B/2163B

Six Shattuck Road
Andover, MA  01810-2449
(800) 227-8766 or (508) 975-2350

Fax:  (508) 975-0093

E-mail:[email protected]

Web site:  http://www.mksinst.com

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Summary of Contents for Mass-Flo 1159B

Page 1: ...service in house repair center WE BUY USED EQUIPMENT Sell your excess underutilized and idle used equipment We also offer credit for buy backs and trade ins www artisantg com WeBuyEquipment REMOTE IN...

Page 2: ...B 2159B 1160B 2160B 1162B 2162B 1163B 2163B Six Shattuck Road Andover MA 01810 2449 800 227 8766 or 508 975 2350 Fax 508 975 0093 E mail mks mksinst com Web site http www mksinst com Artisan Technolog...

Page 3: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 4: ...tute the exclusive and sole remedy of the purchaser for any breach by MKS of this warranty The purchaser before returning any equipment covered by this warranty which is asserted to be defective by th...

Page 5: ...111155 P1 Rev K 10 96 MKS Mass Flo Controller Types 1159B 2159B 1160B 2160B 1162B 2162B 1163B 2163B Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 6: ...of MKS Instruments Inc Andover MA Cajon VCR and VCO are registered trademarks of Cajon Company Macedonia OH Kalrez and Viton are registered trademarks of DuPont de Nemours E I Co Inc Wilmington DE Ne...

Page 7: ...Setup 13 Mounting an MFC 14 Mounting an MFC Configured with a NUPRO Valve 14 Gas Line Connections 15 How To Install a Swagelok Fitting 15 Chapter Three Overview 17 General 17 NUPRO Positive Shut off V...

Page 8: ...Determine the Flow Controller Range 32 How To Read the Flow Output Directly 33 Chapter Six Maintenance 35 Valve Adjustment 35 Repair 36 Chapter Seven Troubleshooting 37 Appendix A Product Specificatio...

Page 9: ...ng Holes 14 Figure 4 Aluminum Mounting Plate Holes 14 Figure 5 Standard Compression Fitting 15 Figure 6 Dimensions 18 Figure 7 NUPRO Valve Dimensions 18 Figure 8 Wiring Diagram for an Input Divider 33...

Page 10: ...List of Figures and Tables vi Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 11: ...DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument Return the instrument to an MKS Calibration and Service Center...

Page 12: ...e operated at pressures higher than the rated maximum pressure refer to the product specifications for the maximum allowable pressure INSTALL A SUITABLE BURST DISC When operating from a pressurized ga...

Page 13: ...njury to personnel Caution The CAUTION sign denotes a hazard It calls attention to an operating procedure practice or the like which if not correctly performed or adhered to could result in damage to...

Page 14: ...Safety Procedures and Precautions 4 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 15: ...urement technique U S Patent Nos 4464932 4679585 Foreign Patents Patents Pending each instrument is a laminar flow device whose precise indication of mass flow is achieved through the use of a range c...

Page 16: ...al dimensions and electrical pinouts of the instruments It also includes information about the NUPRO valve interface cables and the control valve Chapter Four Operation explains how to start up and op...

Page 17: ...obtain information about companion products MKS offers contact any authorized MKS Calibration and Service Center If it is necessary to return the instrument to MKS please obtain an ERA Number Equipme...

Page 18: ...Customer Support Chapter One General Information 8 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 19: ...of the back cover of this manual for a list of MKS Calibration and Service Centers Unpacking Checklist Standard Equipment Type 1100 Series MFC unit Refer to Introduction page 5 for a description of th...

Page 20: ...r input required is 15 VDC 5 300 mA A The maximum voltage current at startup is 15 VDC 5 300 mA B The typical steady state voltage current should be 15 VDC 180 mA 4 The warm up time is 30 minutes for...

Page 21: ...the connector s must make good contact to the device s case ground Good contact is about 0 01 ohms and the ground should surround all wires Contact to ground at just one point may not suffice 4 For sh...

Page 22: ...Metal Cable Clamp For Physical Strain Relief Figure 1 Preferred Method To Connect a Shielded Cable Example 2 Alternate Method To Connect Cable shown on a transducer Transducer Overall Insulation if pr...

Page 23: ...ccording to the instructions in Warm Up and Start Up page 25 3 Install the MFC in the gas stream such that the flow will be in the direction of the arrow on the side of the controller s base 4 Be sure...

Page 24: ...clude a positive shut off NUPRO 4BN Valve in their configurations Each assembly is attached to an aluminum plate and is intended to be mounted horizontally Vertical mounting is acceptable but a correc...

Page 25: ...ee of axial scratches 2 Insert the tubing through the compression nut and ferrules all the way to the shoulder Figure 5 shows the components in a standard compression fitting Nut Back Ferrule Shoulder...

Page 26: ...Gas Line Connections Chapter Two Installation 16 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 27: ...MFC 1100 Series instruments offer a choice of either normally closed or normally open versions as well as a choice of either a Type D or a recessed P C card edge connection The MFC 1100 Series instrum...

Page 28: ...gelok 4 44 112 8 mm Figure 6 Dimensions 0 928 0 010 9 16 18 UNF 2B outlet 5 16 24 UNF 2B inlet 10 32 air vent 1 8 NPT Female air inlet 0 500 0 015 1 0 0 015 1 25 0 03 31 8 0 7 mm 2 38 0 03 60 5 0 7 mm...

Page 29: ...s the ports of 3x10 8 sccm He and a leak rate of less than 1x10 9 sccm He to the outside The following configurations are available Type 2159 An MFC Type 1159 configured with a NUPRO BN positive shut...

Page 30: ...ds are not CE Mark compliant Note 1 Metal braided shielded cables are required to meet CE Mark specifications 2 To order metal braided shielded cables add an S after the cable type designation For exa...

Page 31: ...nector Pinout Pin Assignment Pin Assignment 1 MKS Test Point 9 No Connection 2 Flow Signal Output 10 Optional Input 3 Valve Close 11 Signal Common 4 Valve Open 12 Signal Common 5 Power Common 13 No Co...

Page 32: ...KS Test Point No Connection 9 K No Connection Signal Ground 10 L Valve Close Table 2 P C Edge Card Connector Pinout Note 1 Pins 1 through 10 are located on one side of the gold finger connection and p...

Page 33: ...control current is used to lift the armature from the seat allowing a controlled flow of gas In MFCs with normally open valves 1162 1163 2162 and 2163 the control current is used to pull the armature...

Page 34: ...Control Valve Chapter Three Overview 24 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 35: ...When power is first applied the output signal jumps to 7 5 VDC You can monitor the flow output signal as the heaters stabilize and the output approaches zero After being powered for a minute or so th...

Page 36: ...ay occur momentarily while the gas pressure equalizes across the flow controller 2 Turn the Zero pot located on the input side of the flow controller until the readout displays zero Refer to Figure 6...

Page 37: ...meter purges at a rate of flow that is somewhat less than the full scale range of the controller Adjusting the Speed to Set Point The 1100 Series MFC instruments are equipped with a circuit that prov...

Page 38: ...NUPRO BN Shutoff Valve Chapter Four Operation 28 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 39: ...s are established such that a voltage change on the sensor winding is a linear function of a flow change This signal is then amplified to provide a 0 to 5 VDC output Improved response times compared t...

Page 40: ...e set point is below the flow signal negative in relation to the flow signal the valve closes Most controllers use an integral mode which means that the longer the error endures the more the valve ope...

Page 41: ...d Cp x x x where GCFx Gas Correction Factor for gas X dx Standard Density of gas X g l at 0 C and 760 mmHg Cpx Specific Heat of gas X cal g C 0 3106 Density of nitrogen Specific Heat of nitrogen S Mo...

Page 42: ...in the following formula GCF of N2 GCF of Ar x Desired flow rate of Ar where x is the flow rate of nitrogen sccm 1 00 1 39 x 250 sccm Ar x 180 sccm N2 A flow rate of 250 sccm of Ar will produce a flo...

Page 43: ...o read the flow signal directly Using the values from the example above and assuming a 1 Volt F S readout the flow signal must be divided 2 44 to 1 00 Volts 2 44 V 10 K 1 00 V 100 sccm 14 4 K Use 1 RN...

Page 44: ...How To Read the Flow Output Directly Chapter Five Theory of Operation 34 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 45: ...he factory prior to shipment using a Helium Mass Spectrometer to assure a leak integrity of 10 5 scc sec He If leak checked using a MFC valve adjustment bench test as described below with no set point...

Page 46: ...f 5 VDC to give 100 of F S The voltage level at pin J pin 1 Type D connector should be between 0 and 5 0 VDC during control Repair Contact any authorized MKS Sales Office or Calibration and Service Ce...

Page 47: ...oning Valve incorrectly adjusted Disconnect valve override Return for service Return for service Unit produces large pressure drop or will not pass full flow Clogged sensor tube and or bypass Return f...

Page 48: ...Chapter Seven Troubleshooting 38 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 49: ...dg Resolution measurement 0 1 of F S Temperature Coefficients Zero Span 0 05 of F S C 500 ppm 6 0 10 of Rdg C 1000 ppm Warm up Time 30 minutes7 Due to continuing research and development activities th...

Page 50: ...ecifications Dimensions Body length less fittings VCR mating face to face 5 30 H x 3 00 L x 1 45 W8 134 6 mm x 76 2 mm x 36 8 mm 5 30 H x 4 88 L x 1 45 W 134 6 mm x 76 2 mm x 36 8 mm Fittings Standard...

Page 51: ...1144 1 964 1 250 6 86 3 926 3 163 0 701 1 00 0 31 0 42 0 86 Chlorodifluoromethane Freon 22 Chloropentafluoroethane Freon 115 Chlorotrifluoromethane Freon 13 Cyanogen Deuterium CHClF2 C2 ClF5 CClF3 C2...

Page 52: ...29 5 395 4 660 0 98 0 50 0 33 0 35 0 38 Freon 13 B1 Freon 14 Freon 21 Freon 22 Freon 23 CBrF3 CF4 CHCl2 F CHClF2 CHF3 0 1113 0 1654 0 140 0 1544 0 176 6 644 3 926 4 592 3 858 3 127 0 37 0 42 0 42 0 46...

Page 53: ...ide Nitrogen Trifluoride Nitrous Oxide Octafluorocyclobutane Freon C318 Oxygen NO2 NF3 N2 O C4 F8 O2 0 1933 0 1797 0 2088 0 185 0 2193 2 052 3 168 1 964 8 937 1 427 0 16 0 48 0 71 0 17 1 00 Pentane Pe...

Page 54: ...afluoride Xenon SF6 CCl3 F SiHCl3 CCl2 FCClF2 or C2 Cl3 F3 WF6 Xe 0 1592 0 1357 0 1380 0 161 0 0810 0 0378 6 516 6 129 6 043 8 360 13 28 5 858 0 26 0 33 0 33 0 20 0 25 1 32 1Empirically defined 2Consu...

Page 55: ...eak rate 19 M Manual organization 6 Measurement 29 Messages definitions of 3 Mounting 14 N Normally closed valves 5 17 Normally open valves 5 17 NUPRO valve 5 17 19 27 O Operation 25 R Readout 33 Repa...

Page 56: ...Index 46 Valve override 27 Z Zero 18 26 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 57: ...service in house repair center WE BUY USED EQUIPMENT Sell your excess underutilized and idle used equipment We also offer credit for buy backs and trade ins www artisantg com WeBuyEquipment REMOTE IN...

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