e-Vision and e- LP101013.100 – 01 January 2004
MKS Instruments, Spectra Products
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C) MAINTENANCE
WARNING-DANGEROUS VOLTAGES EXIST INSIDE THE EQUIPMENT
1. Maintenance functions must only be carried out by competent persons.
2. During the warranty period, faulty equipment must be returned to MKS
Instruments, Spectra Products Ltd., unless special arrangements are made.
3. There are no user serviceable parts in the electronic equipment. Certain
components are EMC and safety critical and must not be substituted. Replacement
parts are available from MKS Instruments, Spectra Products Ltd.
4. Equipment enclosures embody certain special fastenings and bonding devices
that affect EMC and safety performance. These must be correctly re-fitted after
servicing.
