e-Vision and e- LP101013.100 – 01 January 2004
MKS Instruments, Spectra Products
32
7.6.3 Source Re-assembly
Refer to the exploded views of the Alignment Jig shown on Page 35 and the Source
Assembly shown on Page 34.
1. Place the source alignment jig flat on the bench and slide in the source
mounting ring, aligning the extract plate’s barrel connector with the alignment mark
on the jig.
2. Insert each of the four lengths of wire into the four castellations, which will hold
the ceramic parts in place while the source assembly is rebuilt.
3. Slide one ceramic tube (Item 3) down each of the wires and then a ceramic
washer (Item 4).
4. Orientate the source plate so that the largest circular cutout is above the extract
plate’s barrel connector and carefully slide it down the wires and over the ceramic
tubes.
5. Place one ceramic washer over each of the exposed ceramic tubes.
6. Orientate the repeller plate so the circular cutouts align with the two visible
barrel connectors and slide it down the wires over the ceramic tubes and onto the
ceramic washers.
7. Place one ceramic washer over each of the exposed ceramic tubes.
8. Carefully remove one of the wires and replace with a M1.6 pan head screw
(Item 2) and the M1.6 stainless steel washer (Item 1), which should be screwed
down but not tightened, repeat this for the remaining three wires.
9. Check that all the plates and ceramics are seated properly before tightening the
screws fully. Be careful not to over-tighten, as this will damage the ceramic spacers.
10. Push out the completed source assembly from the jig and place it on a clean,
non-conducting surface. Using an Ohmmeter, check that there are no short circuits
present between any of the three plates or the source mounting ring.
If any shorts are discovered, correct them before continuing.
11. The filament plate can now be re-fitted and the remaining connection made.
Once again, check all connections with an Ohmmeter before returning the analyser
back to the vacuum chamber.
