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MKS 651C Instruction Manual Download Page 24

Symboles apparaissant sur l'appareil

Informations relatives à la sécurité

10

Symboles apparaissant sur l'appareil

Le tableau suivant décrit les symboles apparaissant sur l'appareil.

Définition des symboles apparaissant sur l'appareil

|

Marche (sous tension)

IEC 417, No. 5007

Arrêt (hors tension)

IEC 417, No. 5008

Terre (masse)

IEC 417, No. 5017

Terre de protection

 (masse)

IEC 417, No. 5019

Masse

IEC 417, No. 5020

Equipotentialité

IEC 417, No. 5021

Courant continu

IEC 417, No. 5031

Courant alternatif

IEC 417, No. 5032

Courant continu et

alternatif

IEC 417, No. 5033-a

Matériel de classe II

IEC 417, No. 5172-a

Courant alternatif

triphasé

IEC 617-2 No. 020206

Attention : se reporter

à la documentation

ISO 3864, No. B.3.1

Attention : risque de

secousse électrique

ISO 3864, No. B.3.6

Attention : surface

brûlante

IEC 417, No. 5041

Tableau 3 : Définition des symboles apparaissant sur l'appareil

Summary of Contents for 651C

Page 1: ...P1 Rev F 10 97 Instruction Manual MKS Type 651C Pressure Controller Six Shattuck Road Andover MA 01810 2449 800 227 8766 or 978 975 2350 Fax 978 975 0093 E mail mks mksinst com Web site http www mksin...

Page 2: ...ser The foregoing shall constitute the exclusive and sole remedy of the purchaser for any breach by MKS of this warranty The purchaser before returning any equipment covered by this warranty which is...

Page 3: ...115605 P1 Rev F 10 97 MKS Type 651C Pressure Controller Set Point A B C Stop Open Close Learn Zero Select Adjust 600 Series Pressure Controller Valve Local Remote Parameters D E...

Page 4: ...ion storage or retrieval system except as may be expressly permitted in writing by MKS Instruments Inc Baratron is a registered trademark of MKS Instruments Inc Andover MA This manual is for firmware...

Page 5: ...d utilisation 9 Symboles apparaissant sur l appareil 10 Mesures de s curit et mises en garde 11 Informaci n sobre seguridad 13 S mbolos usados en el manual de instrucciones 13 S mbolos que aparecen e...

Page 6: ...Battery Backups 30 Rear Panel 31 Rear Panel Components 31 Electrical Connections 32 Labels 38 Serial Number Label 38 Chapter Four System Setup 39 Overview 39 RS 232 Commands and Requests 39 Valve Sel...

Page 7: ...g Set Point 56 How To Zero the Analog Set Point 56 How To Calibrate Full Scale Span for the Analog Set Point 57 How To Set Lead and Gain Parameters 58 How To Calibrate Span of the A D Converter 59 Cha...

Page 8: ...nt 78 How To Calibrate Span of the A D Converter 79 How To Respond To a Checksum Error 80 How To Set the Lead and Gain Parameters 81 How To Set The Softstart Control Rate 83 How To Set the Softstart R...

Page 9: ...U Board 99 Replacing the Cover 99 Chapter Eight Valve Failsafe Battery Back up Option 101 General Information 101 Battery Voltage 102 Valve Positions 102 Startup 103 Threshold Voltage Check 103 Batter...

Page 10: ...cers 117 Adapter Cables 118 Appendix D Type 651 Displayless Unit 119 Type 651 Displayless Unit 119 RS 232 Configuration 120 Internal Switches 120 Opening Closing the 651 Controller 120 Dipswitch Bank...

Page 11: ...6 I O Board Digital Input Circuitry 90 Figure 7 I O Board Digital Output Circuitry 91 Figure 8 Location of the Battery backed RAM Module 98 Figure 9 Initial Display Screen 103 Figure 10 Default Press...

Page 12: ...List of Figures x...

Page 13: ...ector Pinout 36 Table 12 System Interface Cables for MKS Transducers 36 Table 13 Valve Connector Pinout 37 Table 14 System Interface Cables for MKS Throttle Valves 37 Table 15 Sensor Range Values 67 T...

Page 14: ...List of Tables xii...

Page 15: ...e condition or the like which if not correctly performed or adhered to could result in injury to personnel Caution The CAUTION sign denotes a hazard It calls attention to an operating procedure practi...

Page 16: ...d IEC 417 No 5019 Frame or chassis IEC 417 No 5020 Equipotentiality IEC 417 No 5021 Direct current IEC 417 No 5031 Alternating current IEC 417 No 5032 Both direct and alternating current IEC 417 No 50...

Page 17: ...nel only GROUNDING THE PRODUCT This product is grounded through the grounding conductor of the power cord To avoid electrical shock plug the power cord into a properly wired receptacle before connecti...

Page 18: ...d ground than that specified in the manual USE THE PROPER FUSE Use only a fuse of the correct type voltage rating and current rating as specified for your product DO NOT OPERATE IN EXPLOSIVE ATMOSPHER...

Page 19: ...GTGP WPUCEJIGO G WUH JTWPI D Y WPIGP IGPFG GT EMUKEJVKIWPI W TRGTXGTNGV WPI H JTGP MCPP 8QTUKEJV Das Symbol VORSICHT weist auf eine Gefahrenquelle hin Es macht auf einen Bedienungsablauf eine Arbeitsw...

Page 20: ...rde IEC 417 Nr 5017 Schutzleiter IEC 417 Nr 5019 Rahmen oder Chassis IEC 417 Nr 5020 quipotentialanschlu IEC 417 Nr 5021 Gleichstrom IEC 417 Nr 5031 Wechselstrom IEC 417 Nr 5032 Wechselstrom und Gleic...

Page 21: ...d Kundendienst ein Dadurch wird sicher gestellt da alle Sicherheitseinrichtungen voll funktionsf hig bleiben Wartung nur durch qualifizierte Fachleute Das Geh use des Instruments darf vom Bedienperson...

Page 22: ...0 75 mm 2 betragen Das Netzkabel sollte einen Pr fvermerk einer zust ndigen Pr fstelle tragen z B VDE Semko oder SEV Richtige Stromquelle verwenden Dieses Produkt ist f r eine Stromquelle vorgesehen...

Page 23: ...UGPVCPV WP TKUSWG FG DNGUUWTG GP ECU F GZ EWVKQP KPEQTTGEVG QW FG PQP TGURGEV FGU EQPUKIPGU VVGPVKQP L indication ATTENTION signale un danger potentiel Elle est destin e attirer l attention sur une p...

Page 24: ...5017 Terre de protection masse IEC 417 No 5019 Masse IEC 417 No 5020 Equipotentialit IEC 417 No 5021 Courant continu IEC 417 No 5031 Courant alternatif IEC 417 No 5032 Courant continu et alternatif I...

Page 25: ...PAR UN PERSONNEL QUALIFI L op rateur de l appareil ne doit pas enlever le capot de l appareil Le remplacement des composants et les r glages internes doivent tre effectu s uniquement par un personnel...

Page 26: ...est con u pour fonctionner en s alimentant sur une source de courant lectrique n appliquant pas une tension entre les conducteurs d alimentation ou entre les conducteurs d alimentation et le conducte...

Page 27: ...EQPFKEK P GVE SWG FG PQ TGCNK CTUG W QDUGTXCTUG EQTTGEVCOGPVG RQFT C ECWUCT NGUKQPGU C NQU GORNGCFQU 2TGECWEK P El s mbolo de PRECAUCI N indica un riesgo Pone de relieve un procedimiento pr ctica etc...

Page 28: ...a tierra IEC 417 N 5017 Protecci n a tierra IEC 417 N 5019 Caja o chasis IEC 417 N 5020 Equipotencialidad IEC 417 N 5021 Corriente continua IEC 417 N 5031 Corriente alterna IEC 417 N 5032 Corriente co...

Page 29: ...EFECTUADAS NICAMENTE POR T CNICOS ESPECIALIZADOS Los operarios no deben retirar las cubiertas del instrumento El cambio de piezas y los reajustes internos deben efectuarlos nicamente t cnicos especia...

Page 30: ...LIMENTACI N EL CTRICA ADECUADA Este instrumento debe funcionar a partir de una fuente de alimentaci n el ctrica que no aplique m s voltaje entre los conductores de suministro o entre uno de los conduc...

Page 31: ...pressure readout can be displayed in units of Torr mTorr mbar bar Pascal kPa cmH2O or inH2O Five reprogrammable set points are provided each one having the option of being setup for pressure or posit...

Page 32: ...he 651 pressure controller using the menu selection prompts displayed on the front panel Chapter Five Local Operation describes how to operate the instrument from the front panel and includes detailed...

Page 33: ...n the use of your Type 651 instrument or to obtain information about companion products MKS offers contact any authorized MKS Calibration and Service Center If it is necessary to return the instrument...

Page 34: ...Customer Support Chapter One General Information 20 This page intentionally left blank...

Page 35: ...diately If it is necessary to return the instrument to MKS obtain an ERA Number Equipment Return Authorization Number from the MKS Service center before shipping Please refer to the inside of the back...

Page 36: ...ard cable to connect the 651 controller to a Type 627 transducer use part number CB259 5 10 for a metal braided shielded cable use part number CB259S 5 10 Product Location and Requirements The Type 65...

Page 37: ...out or in either a 9 inch deep or 12 inch deep rack The optional valve failsafe battery backup requires 12 inches A The RM 13 rack mount option supports a 9 inch deep rack B The RM 14 rack mount optio...

Page 38: ...50 60 Hz 75 VA max 0 315A T 250V 5 x 20 mm High power 115 VAC 90 132 VAC 48 62 Hz 150 VA max 1 25A T 250V 5 x 20 mm 230 VAC 180 264 VAC 48 62 Hz 150 VA max 0 63A T 250V 5 x 20 mm Table 5 Fuse Informat...

Page 39: ...ion of the switch on the high power unit The label above the switch on either unit shows the corresponding voltage range and fuse requirements for either voltage setting 2 Use a small device for examp...

Page 40: ...d Fuse Data for the High Power Unit The 651 pressure controller is now ready for valve connection and system setup Refer to Chapter Three Overview page 27 for an overview of the controller and to Chap...

Page 41: ...ge 28 summarizes the functions of the front panel components Key Lock switch Parameter scrolling keys Adjust knob Sensor zero function keys Learn function key Setpoint selection keys Display window Va...

Page 42: ...start rate depending on how the unit is configured Parameter scrolling keys Used to scroll through displays down and up Adjust knob Used to enter parameter values Learn function key Used to enable the...

Page 43: ...mation about RS 232 control and digital logic operation Command Priority The 651 pressure controller responds to the most recent command whether it is issued in Local mode or Remote mode In switching...

Page 44: ...ntrol valve moves toward set point The rate is given as a percent of full speed and can be used on either a pressure or position set point Once set point is achieved under softstart control the valve...

Page 45: ...The four Type D connectors are also located on the rear panel Valve Connector Serial Interface Connector I O Connector Transducer Connector Fuse Holder Line Voltage Selector Switch Power On Off Switch...

Page 46: ...standard cable to connect the 651 controller to a Type 627 transducer use part number CB259 5 10 for a metal braided shielded cable use part number CB259S 5 10 Serial RS 232 Interface Connector Pinout...

Page 47: ...ight through CB651 10 10 651 Serial Communications to 25 pin serial port pins 2 and 3 reversed CB651 11 10 Table 9 RS 232 Serial Communication Cables Caution The MKS RS 232 Serial Communications cable...

Page 48: ...point 10 11 Hold only pin 11 low to select analog set point with pressure control Hold both pin 6 and pin 11 low to select analog set point with position control 12 Select set point E low 13 Select s...

Page 49: ...ow out of limit 30 15V Output 31 15V Output 32 Power ground 33 Set point input 34 Set point input 35 Analog ground 36 Pressure output voltage 37 Position output voltage A Reserved pin assignment means...

Page 50: ...V Supply 10 Reserved 11 Digital ground 12 Pressure input 13 Reserved 14 Reserved 15 Chassis ground Table 11 Transducer Connector Pinout System Interface Cables for MKS Transducers Transducer Type Num...

Page 51: ...ground 4 Open limit switch signal 5 Closed limit switch signal 6 Motor winding B high 7 Motor winding B low 8 15 V 25 mA for Opto switches Table 13 Valve Connector Pinout System Interface Cables for...

Page 52: ...ays the CE mark signifying compliance with the European CE regulations Serial Model MKS Instruments Inc Made in the USA 0123456789 651CXYZCD Figure 5 Serial Number Label The product model number code...

Page 53: ...adjustments using the controls on the front panel At initial power up the display screen listing the current software firmware version appears for about five seconds The system then defaults to its p...

Page 54: ...troller and the valve in the system 1 Be sure that the valve is connected to the 651 unit and the Key Lock switch is set to Local 2 Press the and the valve CLOSE key simultaneously for about three sec...

Page 55: ...d valve close Direction of valve control It is possible to exit the Setup menu and return to the system s default display pressure and position by pressing any key at any time The Setup menu input can...

Page 56: ...l to the next topic in the Setup menu BAUD RATE 9600 2 Select the desired baud rate The display list includes the following baud rate settings 300 1200 2400 4800 9600 initial setting 3 Scroll to the n...

Page 57: ...h the display list until the range of the sensor connected to the unit appears Note To view the range of a sensor in pressure units of mbar for a sensor calibrated in Torr select the equivalent mbar u...

Page 58: ...list includes the following pressure units Torr kPa mTorr Pa mbar cmH2 O bar inH2 O initial setting 6 Scroll to the next topic SENSOR SIGNAL 10 VOLTS 7 Scroll through the display list until the sensor...

Page 59: ...setting is 0 to 5 Volts Refer to How To View and Adjust the Analog Set Point page 56 or How To Adjust the Analog Set Point Value page 76 for more information Valve Position Output 1 From the analog s...

Page 60: ...e either pressure or position for set point A and scroll to the next topic SETPOINT B TYPE POSITION 3 Choose either pressure or position for set point B 4 Continue to scroll through the menus in the m...

Page 61: ...een 0 1 and 100 desired for set point A then scroll to the next topic SOFT START RATE SETPT B 100 0 3 Select the softstart rate between 0 1 and 100 desired for set point B 4 Continue to scroll through...

Page 62: ...The 651 controller is initially configured to use direct action to control the valve 1 From the valve close softstart rate display scroll to the next topic in the menu selection VALVE DIRECTION DIRECT...

Page 63: ...can be made under the following topics How to view and adjust set points as well as how to activate set points How to identify an out of range condition How to control the valve How to activate and st...

Page 64: ...that PID is selected 3 If Self Tuning is selected turn the Adjust knob clockwise to select PID control 4 Scroll to the set point A screen A sample display of set point A SP A is shown below In this ex...

Page 65: ...ed set point That is the display at the top shows the actual pressure and the display at the bottom shows the valve position The light remains lit in the set point key until another set point or valve...

Page 66: ...full close press the CLOSE key The system responds by turning a light on in the CLOSE key and driving the throttle valve to full close The front panel window returns to the default display of pressur...

Page 67: ...ss Do not vary the gas flow rate during learning 2 Press the LEARN key for about three seconds The system responds by illuminating a light in the LEARN key and initiating the learning process The fron...

Page 68: ...To Use Special Zero The special zero function is used to zero base pressure in systems where the known pressure is not at but near zero displayed on another readout in the system 1 Press and the ZERO...

Page 69: ...pressure controller de actuates the relay a normally open contact opens and a normally closed contact closes when the pressure crosses above the high trip point or below the low trip point How To View...

Page 70: ...ed is 5 Volts the analog set point display indicates that input by showing a value of 50 An example of the analog set point display is shown below ANALOG SETPOINT VALUE 50 0 There is no light on the f...

Page 71: ...ss and the STOP key simultaneously for about three seconds until the following display appears CAUTION CALIBRATION MODE 2 Press the Setpoint D key The following display appears ANLG SP 99 90 FULL SPAN...

Page 72: ...unit to use the selected parameters Once the signal goes high the instrument will default back to set point A parameters within 50 milliseconds For example to apply the lead and gain parameters associ...

Page 73: ...pins on the transducer connector Connect a differential voltage to pins 2 and 12 with pin 12 tied to pin 5 Refer to Table 11 page 36 for the transducer connector pinout You must know the exact voltag...

Page 74: ...How To Calibrate Span of the A D Converter Chapter Five Local Operation 60 This page intentionally left blank...

Page 75: ...Requests Messages sent to the 651 controller are either commands that instruct the controller to change an operating parameter or requests that prompt the controller to report status information Resp...

Page 76: ...ed would be S120 ENTER If you choose to use an optional space for clarity the actual keys pressed would be S1 20 ENTER Note When sending any message command or request to the 651 controller you must f...

Page 77: ...he R1 request for the value of set point A is shown in the table as S1 value where value is a of F S To report a set point of 3 Torr on a 10 Torr sensor the controller sends S130 Priority of Command E...

Page 78: ...cycling before proceeding This test can be performed prior to installing the 651 controller and the valve in the system 1 Be sure that the valve is connected to the 651 unit 2 Issue the following comm...

Page 79: ...the following response V value where value is 0 Self Tuning control 1 PID control 2 To change the control mode issue one of the following two commands For Self Tuning control V0 ENTER For PID control...

Page 80: ...the sensor parameters How To Change the Sensor Type The 651 controller can work with either Absolute or Differential pressure sensors Issue the following command to select the sensor type U value wher...

Page 81: ...ues Torr millibar 0 0 1 13 1 33 1 0 2 14 2 66 2 0 5 15 13 33 3 1 16 133 3 4 2 17 1333 5 5 18 6666 6 10 19 13332 7 50 8 100 9 500 10 1000 11 5000 12 10000 initial value Table 15 Sensor Range Values Not...

Page 82: ...orr for a 100 Torr F S unit then value 10 Converting Pressure Readings to Absolute Pressure Values To convert pressure readings to absolute pressure values 1 Request the pressure reading by issuing th...

Page 83: ...will be zero How To Use the Special Zero The special zero function is used to zero base pressure in systems where the known base pressure is not at but near zero as measured by another transducer on t...

Page 84: ...ate should be close to that used for the actual process use the maximum flow rate if several flow rates are used in the process Do not vary the gas flow rate during the learn function 2 Issue the foll...

Page 85: ...not be operating at those pressures it is possible to stop the learn function early Caution Do not stop the learn function until it is well above the highest pressure at which the process will be ope...

Page 86: ...onds with the following message MXYZ where X indicates the active set point 0 for the analog set point 1 for set point A 2 for set point B 3 for set point C 4 for set point D 5 for set point E Y indic...

Page 87: ...E and one external analog set point received through the I O connector The 651 controller uses the active set point to control the system Only one set point can be designated as the active set point I...

Page 88: ...for position 1 pressure Note This RS 232 command overrides the digital logic control for the analog set point Refer to Digital Logic Control page 90 for information about the digital logic control of...

Page 89: ...of close if the unit is in position control reverse direction The system responds by immediately storing the set point value The system pressure does not change however unless the selected set point i...

Page 90: ...ctual input applied is 5 Volts the analog set point value will be 50 The system responds to an analog set point voltage by immediately storing the analog set point value The system pressure does not c...

Page 91: ...int Full Scale The controller is calibrated at the factory for 10 Volt full scale input if the actual input applied is 10 Volts the controller s analog set point reading is 100 100 To recalibrate the...

Page 92: ...t the value of the analog set point S6 value ENTER where value 0 for 100 of the controlling transducer s range 1 for 10 of the controlling transducer s range 2 To check the full scale level of the ana...

Page 93: ...nd the command Y1 value ENTER where value is the applied voltage F S expressed as a percent For example if the applied voltage is 7 0 Volts with 10 Volts F S value 70 For this example value 70 and the...

Page 94: ...rrect the problem To perform a full calibration 1 Zero the analog set point Perform the steps described in How To Zero the Analog Set Point page 77 2 Learn the analog set point full scale Perform the...

Page 95: ...sly for the 651 unit to use the selected parameters Once the signal goes high the instrument will default back to set point A parameters within 50 milliseconds The 651 unit will use the lead and gain...

Page 96: ...oint E 46 requests the gain parameter for set point A 47 requests the gain parameter for set point B 48 requests the gain parameter for set point C 49 requests the gain parameter for set point D 50 re...

Page 97: ...r set point D 5 for set point E 6 for the analog set point 7 for valve open 8 for valve close value softstart rate expressed as a percent of full speed between 0 1 and 100 How To Use the Softstart Rat...

Page 98: ...t C 18 for set point D 19 for set point E 20 for the analog set point 21 for valve open 22 for valve close The 651 controller responds with the message Ix value where x 1 for set point A 2 for set poi...

Page 99: ...o check the type of valve selected issue the request R23 ENTER The 651 controller responds with the message Jtype where type 1 for a standard 253 2 for a fast 253 3 for a 653 How To Change and Calibra...

Page 100: ...he 5 Volt range 1 for the 10 Volt range How To Change the Valve Control Direction A valve can be controlled to open and close in a direct or reverse direction Direct valve control direction is defined...

Page 101: ...set point control of the valve How To Open the Valve To drive the valve to full open issue the command O ENTER The system responds by driving the throttle valve to full open How To Close the Valve To...

Page 102: ...To View and Adjust a Process Limit Relay 1 To check a process limit threshold issue the command Rxx ENTER where xx 10 for the low threshold for process limit 1 11 for the high threshold for process li...

Page 103: ...ponse MXYZ where X 1 for remote control Y describes the state of the learn function 0 when not performing the learn function 1 when learning the system 2 when learning the valve Z 0 open 1 close 2 sto...

Page 104: ...ient voltages A brief description of the digital circuitry of the I O board is provided in the following section I O Board Digital Circuitry The I O board contains 16 type 74HC inputs To select an inp...

Page 105: ...e outputs are 2 5 microseconds Each output includes a 240 ohms series resistor to protect it against line surges and spikes Additionally there is a 0 01 FD capacitor connected to the chassis FD From o...

Page 106: ...that is they are not recognized until the higher priority signal is released 3 25 Remote zero 4 5 Learn system 5 8 Close valve 6 27 Open valve 7 26 Stop valve 8 11 Select analog set point 9 16 Select...

Page 107: ...able 18 page 95 lists the specific function of each digital output The first column in each table lists the I O port number assignment Digital Input Functions I O Port No I O Pin No State Digital Inpu...

Page 108: ...o function 12 13 Low High Selects set point D No function 13 12 Low High Selects set point E No function 14 11 Low High Selects analog set point No function 15 10 Low High F S analog set point yields...

Page 109: ...ion 6 17 Low High No function No function Table 18 Digital Output Functions Analog Set Point Inputs The analog set point inputs set point I O pin 33 and set point I O pin 34 on the I O connector are f...

Page 110: ...Digital Logic Control Chapter Six Remote Operation 96 This page intentionally left blank...

Page 111: ...1 unit continually requires relearning at each power cycle power off then on again it may be time to replace it The memory module is located on the CPU board inside the electronics unit and may be rep...

Page 112: ...aight back and out 4 Grasp each end of the board and rock it until it loosens from its position Lift the board up and out of the unit 5 Figure 8 provides the location of the battery backed memory modu...

Page 113: ...s the spring from sliding in completely The space left by the tab enables a small screwdriver to be inserted into the space for easy board removal the next time Replacing the Cover 1 Using the clips o...

Page 114: ...Replacing the Battery Backed Memory Module Chapter Seven Battery Backed Memory Module 100 This page intentionally left blank...

Page 115: ...a power loss when using either Local or Remote operation If a Valve Failsafe Battery Backup is installed an ATTENTION label is affixed to the side of the 651 unit The label states that the unit conta...

Page 116: ...d before turning off Closed The controller closes the valve at power down In the event that the valve is already closed the module provides power for approximately 1 second before turning off Disable...

Page 117: ...d Once the 651 unit has been powered up and the battery back up module has been recognized the actual voltage of the battery is measured Battery Voltage Within Range If the battery voltage is within t...

Page 118: ...ys Battery is low Press key to continue Figure 11 Battery Voltage Low Message If the battery voltage is above 15 5 V the screen displays Battery is high Press key to continue Figure 12 Battery Voltage...

Page 119: ...has been recognized the screen displays BATTERY 13 5V BACK UP OPEN This screen allows you to view the actual battery voltage and the current valve configuration The valve configuration cannot be chang...

Page 120: ...oll through the menu until the battery back up option selection screen appears on the display The screen displays BATTERY 13 5V BACK UP OPEN The screen displays the actual voltage level of the battery...

Page 121: ...power failure 2 close valve at power failure To check the type of valve battery back up control issue the request R 40 The controller responds with the message K value where value 0 option disabled 1...

Page 122: ...ided that the 651 instrument is turned on From a full discharge condition the voltage typically increases from about 11 V to 15 5 V over a five hour period The voltage is maintained at about 14 5 V fo...

Page 123: ...he rear chassis by lifting it up from the clips 5 Remove the top cover by firmly pulling it up and back to clear the top of the connector plates 6 Locate the area of the unit where the chassis splits...

Page 124: ...e to keep the cable away from the heatsink 5 Replace the two screws that attach the circuit assembly to its chassis and the screw removed from the left side of the housing 6 Position the front panel m...

Page 125: ...ping Please refer to the inside back cover of this manual for a list of MKS Calibration and Service Centers Periodically check for wear on the cables and inspect the enclosure for visible signs of dam...

Page 126: ...older 4 Gently press against the clip and push up with the screwdriver until the plastic fuse holder pops out It may be necessary to repeat steps 2 and 3 on the left side to release the fuse holder 5...

Page 127: ...O Transducer RS 232 Serial Communications 9 pin Type D female 37 pin Type D female 15 pin Type D female 9 pin Type D male Display 2 line LCD with 4 place readout Display units Torr mTorr mbar bar Pasc...

Page 128: ...t 15 VDC 0 5 Amps max 3 15 VDC 1 5 Amps max Overrange pressure 10 5 Volts Pressure input signal 10 to 10 Volts Process limit relays 2 24 Volts AC DC 1 Amp resistive contact ratings Set points Internal...

Page 129: ...model code when you order the unit The model code is identified as follows 651C X Y Z C D where Type Number Interface Valve Driver Power Supply Options C Y Z 651C Display X D Type Number 651C This de...

Page 130: ...Valve Driver Z The valve driver is designated by a single letter code Ordering Code Stepper Motor S Power Supply C Two power supplies are available designated by a single number code Ordering Code 0 5...

Page 131: ...9 VAC 50 60 Hz 400 mA 180 to 198 VAC 50 60 Hz 400 mA 100 to 132 VAC 50 60 Hz 500 mA 200 to 264 VAC 50 60 Hz 500 mA 253 653 High power 90 to 132 VAC 48 62 Hz 1 5 A 180 to 264 VAC 48 62 Hz 1 5 A Table 2...

Page 132: ...2 PLO VPO 651 I O CB651 14 1 252 MSO PLO 252 MOS VPO 252 MSO VPO PLO 651 I O CB651 15 1 152 PC VPO 152 PC VPO RS 232 651 I O CB651 16 1 152 RZ VPO RZ VPO RS 232 651 I O CB651 17 1 152 252 Sensor Cable...

Page 133: ...op bit and CR LF delimiter To put the 651 displayless unit into operation via the RS 232 port on the front panel set the Key Lock switch to the Local position When the Key Lock switch is set to the Lo...

Page 134: ...omize RS 232 communications parameters The dipswitch bank is located on the I O board Opening Closing the Type 651 Controller 1 Turn the power off 2 Remove the Phillips screws and washers on the top p...

Page 135: ...ting the I O connector on the rear panel refer to Figure 4 page 31 Figure 16 shows an enlarged view of a dipswitch bank The switches in the dipswitch bank are numbered from 1 to 8 The dipswitch bank h...

Page 136: ...8 Closed End of Line Delimiter CRLF The Reserved pin assignmnet refers to a pin with an internal connection which may be assigned a function in the future Table 23 Default Dipswitch Settings Note Par...

Page 137: ...and RS 232 Communications Settings Function Choices Switches RS 232 Baud Rate 1 2 3 4 The five choices for baud rate are 300 O C O O 1200 O O C O 2400 O O O C 4800 O C C O 9600 C C C O RS 232 Parity...

Page 138: ...RS 232 Configuration Appendix D Type 651 Displayless Unit 124 This page intentionally left blank...

Page 139: ...e 25 for a complete list of the initial configuration settings The last column lists the page number for information on each entry should you wish to change the setting Initial Settings Parameter Defa...

Page 140: ...Input 0 to 5 V 0 to 10 V 45 Pressure Sensor Input 0 to 10 V 0 to 5 V 0 to 1 V 44 Analog Output Pressure 0 to 10 V Position 0 to 10 V No option 0 to 5 V 45 Control Mode Direct Acting Reverse 86 RS 232...

Page 141: ...valve halt as well as selection of the controlling set point are examples of control commands Parameter commands determine the settings used by the 651 controller Set point levels softstart rates and...

Page 142: ...pressure for pressure set points position for position set points of open for direct direction control of closed for reverse direction control S4 value Set level of set point D where value is the of F...

Page 143: ...000 3 1 13 1 33 4 2 14 2 66 5 5 15 13 33 6 10 16 133 3 7 50 17 1333 8 100 18 6666 9 500 19 13332 F value Pressure units value 0 Torr 1 mTorr 2 mbar 3 bar 4 kPa 5 Pa 6 cmH2O 7 inH2O Note The F command...

Page 144: ...f full speed I8 value Set softstart rate of close valve value is of full speed P1 value Set low threshold for process limit 1 value is of F S P2 value Set high threshold for process limit 1 value is o...

Page 145: ...set point exceeds 15 of full scale the controller ignores the command and does not change the current full scale value L Learn the system Self Tuning control Q Stop the learn function while in proces...

Page 146: ...ferential X1 value Set lead of set point A where value seconds X2 value Set lead of set point B where value seconds X3 value Set lead of set point C where value seconds X4 value Set lead of set point...

Page 147: ...uest Reference Command Reference 133 RS 232 Command Summary Continued Command Function K0 Disable battery backup K1 Select valve to open upon power fail K2 Select valve to close upon power fail Table...

Page 148: ...mprove readability RS 232 Requests and Response Summary Request Message Information Requested Response Message R0 Analog set point value S0 value where value is of F S R1 Set point A value S1 value wh...

Page 149: ...0 F S 1 pressure 10 F S R10 Set point E value S5 value where value is of F S R11 Low threshold process limit 1 P1 value where value is of F S R12 High threshold process limit 1 P2 value where value is...

Page 150: ...22 Softstart rate for valve close I8 value where value is of full speed R23 Valve type J type where type equals 1 Std 253 2 Fast 253 3 653 R24 Analog set point range A range where range equals 0 5 Vol...

Page 151: ...s 0 position 1 pressure R31 Position indicator range output B value where value equals 0 5 Volts 1 10 Volts R32 Direct reverse control N value where value equals 0 direct 1 reverse R33 Sensor range E...

Page 152: ...ute 1 Differential R37 System status MXYZ For the value of X 0 Local 1 Remote For the value of Y 0 not learning 1 learning system 2 learning valve For the value of Z 0 open 1 close 2 stop 3 set point...

Page 153: ...e value is seconds R43 Lead C value X3 value where value is seconds R44 Lead D value X4 value where value is seconds R45 Lead E value X5 value where value is seconds R46 Gain A value M1 value where va...

Page 154: ...Request and Response Reference Appendix F Command and Request Reference 140 This page intentionally left blank...

Page 155: ...30 Dipswitch bank 120 23 Displayless unit 119 23 E Electrical information 24 26 End of line delimiter 61 Environmental requirements 23 F Front panel components 29 Fuse 24 26 G Gain parameter 58 81 I...

Page 156: ...message syntax 61 RS 232 responses 63 S Self Tuning control mode 29 41 65 Sensor full scale voltage 44 66 Sensor range 43 67 Sensor type 66 Set points 17 30 41 46 74 active 50 51 72 73 adjusting 50 7...

Page 157: ...your controller to ensure that it recognizes when the battery back up module is present and how to configure the valve position upon a power loss when using either Local or Remote operation Please re...

Page 158: ...d recording or by any information storage or retrieval system except as may be expressly permitted in writing by MKS Instruments Inc This manual is for firmware software version 1 8x Please Note MKS I...

Page 159: ...r can be configured so that the valve will be driven fully open fully closed or will be disabled upon an AC power failure Open The controller opens the valve at power down In the event that the valve...

Page 160: ...unit has been powered up and the battery back up module has been recognized the actual voltage of the battery is measured Battery Voltage Within Range If the battery voltage is within the acceptable r...

Page 161: ...Press key to continue Figure 3 Battery Voltage Low Message If the battery voltage is above 15 5 V the screen displays Battery is high Press key to continue Figure 4 Battery Voltage High Message The s...

Page 162: ...nized the screen displays BATTERY 13 5V BACK UP OPEN This screen allows you to view the actual battery voltage and the current valve configuration The valve configuration cannot be changed from this s...

Page 163: ...menu until the battery back up option selection screen appears on the display The screen displays BATTERY 13 5V BACK UP OPEN The screen displays the actual voltage level of the battery along with the...

Page 164: ...close valve at power failure To check the type of valve battery back up control issue the request R 40 The controller responds with the message K value where value 0 option disabled 1 valve opens at p...

Page 165: ...ctions MKS Type 651C and 655A Pressure Controllers Firmware Revision Kit FRK 651C V1 9 FRK 655A V1 9 Six Shattuck Road Andover MA 01810 2449 800 227 8766 or 978 975 2350 Fax 978 975 0093 E mail mks mk...

Page 166: ...information storage or retrieval system except as may be expressly permitted in writing by MKS Instruments Inc Baratron is a registered trademark of MKS Instruments Inc Andover MA Firmware version 1...

Page 167: ...r Firmware Revision Standard maintenance services are available at all of our regional MKS Calibration and Service Centers listed on the inside back cover of your instruction manual Should you prefer...

Page 168: ...Returning the Type 651 655 Unit for Firmware Revision General Information Page 4 of 8 This page intentionally left blank...

Page 169: ...l substitute parts or perform any unauthorized modification to the instrument SERVICE BY QUALIFIED PERSONNEL ONLY Operating personnel must not remove instrument covers Component replacement and intern...

Page 170: ...Safety Information Page 6 of 8 This page intentionally left blank...

Page 171: ...static free 3 Remove the two Phillips screws located at the top of the rear panel 4 Disengage the cover from the rear chassis by lifting it up from the clips 5 Remove the top cover by firmly pulling i...

Page 172: ...Use any grounded instrument to gently seat the clamping spring firmly in place A metal tab prevents the spring from sliding in completely To remove the board the next time insert a small screwdriver...

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