MKS 651C, Instruction Manual, Page: 143 / 172

Appendix F: Command and Request Reference Command Reference
129
RS-232 Command Summary (Continued)
Command Function
D3 Select set point C
D4 Select set point D
D5 Select set point E
D6
Select analog set point
E value Sensor range value
0 = 0.1 10 = 1000
1 = 0.2 11 = 5000
2 = 0.5 12 = 10000
3 = 1 13 = 1.33
4 = 2 14 = 2.66
5 = 5 15 = 13.33
6 = 10 16 = 133.3
7 = 50 17 = 1333
8 = 100 18 = 6666
9 = 500 19 = 13332
F value
Pressure units value
0 = Torr
1 = mTorr
2 = mbar 3 = µbar
4 = kPa 5 = Pa
6 = cmH
2
O 7 = inH
2
O
Note: The F command merely assigns a label to the
pressure units. It does not convert pressure readings.
Pressure readings are % of F. S.
G value Sensor voltage range value
0 = 1 Volt
1 = 5 Volts
2 = 10 Volts
O Open valve
C Close valve
H Hold valve
Table 26: RS-232 Command Summary
(Continued on next page)