MKS 246C, Instruction Manual

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List of Figures and Tables
vii
List of Figures and Tables
Figures
Figure 1: Front Panel Dimensions ......................................................................................... 23
Figure 2: Rear Panel Dimensions........................................................................................... 23
Figure 3: Side Panel Dimensions........................................................................................... 24
Figure 4: Internal Set Point Control Setup - Ratio Flow Control ............................................ 27
Figure 5: External Set Point Control Setup - Individual Flow Control ................................... 28
Figure 6: External Set Point Control Setup - Ratio Flow Control........................................... 29
Figure 7: Front Panel Controls .............................................................................................. 39
Figure 8: Rear Panel Controls................................................................................................ 41
Figure 9: Scaling Control Potentiometer - Initial Setting ....................................................... 46
Figure 10: Serial Number Label............................................................................................. 51
Figure 11: Gauge Factor Scaling Control Potentiometer - Example Setting ........................... 56
Figure 12: Fuse Holder Clip .................................................................................................. 68
Tables
Table 1: Definition of Symbols Found on the Unit .....................................................................2
Tabelle 2: Definitionen der am Gerät angebrachten Symbole ......................................................6
Tableau 3 : Définition des symboles apparaissant sur l'appareil ................................................10
Tabla 4 : Definición de los símbolos que aparecen en la unidad................................................14
Table 5: System Interface Cables..............................................................................................20
Table 6: Fuse Information ........................................................................................................31
Table 7: Interface Connector J9 Pinout .....................................................................................33
Table 8: MFC Connector J8 Pinout ..........................................................................................34
Table 9: MFC Gauge Factors....................................................................................................45
Table 10: Type 246 Unit Setup - Front Panel Controls .............................................................53
Table 11: External Controller - Front Panel Controls ................................................................63
Table 12: Gas Correction Factors for Pure Gases ......................................................................77