MKS 246C, Instruction Manual

Page: 65 / 92

Chapter Four: Operation How To Setup the System
55
Example:
To calculate the Scaling Control Factor for a 20 sccm MFC, which is flowing pure argon
gas, multiply the Gauge Factor for argon (200), listed in Table 9, page 45, times the Gas
Correction Factor for argon (1.39), listed in Table 12, page 77:
S
CALING
C
ONTROL
F
ACTOR
= G
AUGE
F
ACTOR
x G
AS
C
ORRECTION
F
ACTOR
= 200 x 1.39
= 278
Since the full scale setting of the Scaling Control Potentiometer is 1000, the Scaling
Control Factor of 278 is 27.8% of FS.