MKS 246C, Instruction Manual

Page: 90 / 92

Appendix C: Gas Correction Factors for Commonly Used Pure Gases
80
Gas Correction Factors for Pure Gases (Continued)
GAS SYMBOL SPECIFIC HEAT, Cp
cal/goC
DENSITY
g/l @ 0oC
CONVERSION
FACTOR
Sulfur Hexafluoride
Trichlorofluoromethane
(Freon - 11)
Trichlorosilane
1,1,2-Trichloro - 1,2,2-Trifluoroethane
(Freon - 113)
Tungsten Hexafluoride
Xenon
SF
6
CCl
3
F
SiHCl
3
CCl
2
FCClF
2
or
(C
2
Cl
3
F
3
)
WF
6
Xe
0.1592
0.1357
0.1380
0.161
0.0810
0.0378
6.516
6.129
6.043
8.360
13.28
5.858
0.26
0.33
0.33
0.20
0.25
1.32
1
Empirically defined.
2
Consult MKS Instruments, Inc. for special applications.
3
The GCF for Oxygen is 0.993 when using thermal MFCs such as the Type 1179, 1479, 1679, 1159, and 1259 units, and related
products. The GCF for Oxygen is 1.000, as listed in the table, for pressure based MFCs such as the Type 1640, 1150, 1151, 1152, and
1153 units.
NOTE: Standard Pressure is defined as 760 mmHg (14.7 psia).
Standard Temperature is defined as 0
o
C
Table 12: Gas Correction Factors for Pure Gases