Mitsubishi Electric MELSENSOR MELSEC iQ-R MH11H01A0LNA User Manual Download Page 1

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MELSEC iQ-R Laser Displacement Sensor
Control Module User's Manual (Sensor Head)

-MH11H01A0SNA

-MH11H01A0LNA

-MH11H01A1SNA

-MH11H01A1LNA

-MH11H01A2SNA

-MH11H01A2LNA

-MH11H03B0SNA

-MH11H03B0LNA

-MH11H05B0SNA

-MH11H05B0LNA

-MH11H05C0SNA

-MH11H05C0LNA

-MH11H08B0SNA

-MH11H08B0LNA

-MH11H08C0SNA

-MH11H08C0LNA

-MH11H11B0SNA

-MH11H11B0LNA

-MH11H35C3SNA

-MH11H11C0LNA

-MH11H11C0SNA

-MH11H35B0LNA

-MH11H35B0SNA

-MH11H35C0LNA

-MH11H35C0SNA

-MH11H35C3LNA

Summary of Contents for MELSENSOR MELSEC iQ-R MH11H01A0LNA

Page 1: ...11H01A1SNA MH11H01A1LNA MH11H01A2SNA MH11H01A2LNA MH11H03B0SNA MH11H03B0LNA MH11H05B0SNA MH11H05B0LNA MH11H05C0SNA MH11H05C0LNA MH11H08B0SNA MH11H08B0LNA MH11H08C0SNA MH11H08C0LNA MH11H11B0SNA MH11H11B0LNA MH11H35C3SNA MH11H11C0LNA MH11H11C0SNA MH11H35B0LNA MH11H35B0SNA MH11H35C0LNA MH11H35C0SNA MH11H35C3LNA ...

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Page 3: ...ons given in this manual are concerned with this product only For the safety precautions of the programmable controller system refer to the MELSEC iQ R Module Configuration Manual In this manual the safety precautions are classified into two levels WARNING and CAUTION Under some circumstances failure to observe the precautions given under CAUTION may lead to serious consequences Observe the precau...

Page 4: ...gh optical instruments such as a microscope and a telescope Shorten the beam paths as much as possible to prevent diffusion of laser beams Terminate the laser beams at the end of their paths by diffusely reflecting materials of appropriate reflectivity and thermal properties or by absorbers Locate the beam path above or below the eye level Wearing protective eyewear is recommended when handling th...

Page 5: ...ritten Doing so will make the data in the flash ROM and SD memory card undefined The values need to be set in the buffer memory and written to the flash ROM and SD memory card again Doing so also may cause malfunction or failure of the module Do not disassemble or modify this product Doing so may cause failure malfunction injury or a fire Clamp cables securely with the terminal screws Incomplete c...

Page 6: ... Failure to do so may result in malfunction due to noise Place the cables in a duct or clamp them If not dangling cables may swing or inadvertently be pulled resulting in malfunction or damage to modules or cables In addition the weight of the cables may put stress on modules in an environment of strong vibrations and shocks Do not clamp the extension cables with the jacket stripped Doing so may c...

Page 7: ...l or malfunction Startup and maintenance of a control panel must be performed by qualified maintenance personnel with knowledge of protection against electric shock Lock the control panel so that only qualified maintenance personnel can operate it Before handling the module touch a conducting object such as a grounded metal to discharge the static electricity from the human body Failure to do so m...

Page 8: ...a fumigant used for disinfection and pest control of wood packaging materials may cause failure of the product Prevent the entry of fumigant residues into the product or consider other methods such as heat treatment instead of fumigation The disinfection and pest control measures must be applied to unprocessed raw wood ...

Page 9: ...is not limited to debt defaults defective warranty QA illegal acts and product liabilities for the quality performance and safety of Mitsubishi s laser displacement sensor Large applications which greatly affect the public such as nuclear power plants operated by each power company and other nuclear power plants Application which request Mitsubishi to construct special QA structures such as railwa...

Page 10: ...arity with the functions and performance of the MELSEC iQ R series programmable controller to handle the product correctly Please make sure that the end users read this manual Relevant products Sensor head MH11H01A0SNA MH11H01A1SNA MH11H01A2SNA MH11H03B0SNA MH11H05B0SNA MH11H05C0SNA MH11H08B0SNA MH11H08C0SNA MH11H11B0SNA MH11H11C0SNA MH11H35B0SNA MH11H35C0SNA MH11H35C3SNA MH11H01A0LNA MH11H01A1LNA...

Page 11: ... 40 30mm type 41 50mm type Class 2 42 50mm type Class 3R 43 85mm type Class 2 44 85mm type Class 3R 45 110mm type Class 2 46 110mm type Class 3R 47 350mm type Class 2 48 350mm type Class 3R 49 8mm type Class 1 51 15mm type Class 1 52 2 3 ND Filter Specifications 53 CHAPTER 3 MAINTENANCE AND INSPECTION 54 3 1 Maintenance 54 3 2 Inspection 54 CHAPTER 4 TROUBLESHOOTING 56 APPENDICES 58 Appendix 1 Ext...

Page 12: ...cement Sensor Control Module User s Manual Sensor Head SH 082023ENG this manual Precautions for using the laser displacement sensor and installation methods specifications maintenance and inspection for the sensor head Print book e Manual PDF MELSEC iQ R Laser Displacement Sensor Control Module User s Manual Startup SH 082017ENG Specifications procedures before operation system configuration wirin...

Page 13: ...r head and the control module Measurement center distance The distance from the light emitting part of the sensor head to the center of the measurement range Measurement range F S The range where the resolution and linearity are guaranteed and the displacement can be measured For example when the measurement range is 5mm the measurement range F S becomes 10mm Sensor head An abbreviation for the la...

Page 14: ...unlight is received Where water oil or chemicals splashes Where load is applied to the product Usage environment Ambient temperature Use the sensor head within the specifications range of 0 to 45 Page 38 SPECIFICATIONS Store the product within the ambient temperature range of 20 to 70 The life of the semiconductor laser depends on the ambient temperature during use When using the product near a he...

Page 15: ...not structurally dustproof waterproof or corrosion resistant Therefore measurement underwater or in the rain is not allowed Be aware of the usage environment Warming up time Allow at least 30 minutes of warming up after emitted laser beam from a sensor head to ensure the performance of the sensor head Measures to reduce noise Install the product as far away as possible from noise source such as hi...

Page 16: ...onnector of the sensor head cable to the plug in side of the connector Sensor head cable Do not pull the cable using a force 29 4N or more when routing the cable with the sensor head and control module fixed Doing so may cause disconnection of the cable At least 20mm is required from the cable connection to the bend The bending radius must be 30mm or more When moving the sensor head during operati...

Page 17: ...esentative if the product breaks down Do not use the product in a way other than specified in this manual Users may be exposed to hazardous laser radiation if the device is controlled or adjusted in procedures not specified in this manual Before use carefully read the content of the warning labels shown below The warning label is posted on the side surface of the sensor head Use the warning label ...

Page 18: ...1 BEFORE USING THE PRODUCT 1 2 Handling of Laser Products Warning label 10mm type MH11H01A0SNA MH11H01A0LNA Label position 30mm type MH11H03B0SNA MH11H03B0LNA Label position Japanese English Korean Chinese ...

Page 19: ...1 BEFORE USING THE PRODUCT 1 2 Handling of Laser Products 17 1 50mm type MH11H05B0SNA MH11H05B0LNA Label position Japanese English Korean Chinese ...

Page 20: ...18 1 BEFORE USING THE PRODUCT 1 2 Handling of Laser Products 50mm type MH11H05C0SNA MH11H05C0LNA Label position Japanese English Korean Chinese ...

Page 21: ...1 BEFORE USING THE PRODUCT 1 2 Handling of Laser Products 19 1 85mm type MH11H08B0SNA MH11H08B0LNA Label position Japanese English Korean Chinese ...

Page 22: ...20 1 BEFORE USING THE PRODUCT 1 2 Handling of Laser Products 85mm type MH11H08C0SNA MH11H08C0LNA Label position Japanese English Korean Chinese ...

Page 23: ...1 BEFORE USING THE PRODUCT 1 2 Handling of Laser Products 21 1 110mm type MH11H11B0SNA MH11H11B0LNA Label position Japanese English Korean Chinese ...

Page 24: ...22 1 BEFORE USING THE PRODUCT 1 2 Handling of Laser Products 110mm type MH11H11C0SNA MH11H11C0LNA Label position Japanese English Korean Chinese ...

Page 25: ...1 BEFORE USING THE PRODUCT 1 2 Handling of Laser Products 23 1 350mm type MH11H35B0SNA MH11H35B0LNA Label position Japanese English Korean Chinese ...

Page 26: ...24 1 BEFORE USING THE PRODUCT 1 2 Handling of Laser Products 350mm type MH11H35C0SNA MH11H35C0LNA Label position Japanese English Korean Chinese ...

Page 27: ...1 BEFORE USING THE PRODUCT 1 2 Handling of Laser Products 25 1 350mm type MH11H35C3SNA MH11H35C3LNA Label position Japanese English Korean Chinese ...

Page 28: ...26 1 BEFORE USING THE PRODUCT 1 2 Handling of Laser Products 8mm type MH11H01A1SNA MH11H01A1LNA 15mm type MH11H01A2SNA MH11H01A2LNA Label position MH11H01A1SNA MH11H01A1LNA MH11H01A2SNA MH11H01A2LNA ...

Page 29: ...nd heat resistance 2 Key control A structure activated by using a key or others Emergency stop switch or other devices Emergency stop switch An emergency stop switch which immediately stops laser light emission Warning device A warning device such as an automatic indicator which enables prompt check of laser light Shutter A shutter which avoids accidental laser emission from a laser emission apert...

Page 30: ...ble place Hazardous nature and harmful effects and precautions Put the indications of hazardous nature harmful effects and precautions of laser light to an easily viewable place Installation of laser equipment Put a sign of laser equipment to an easily viewable place Indication of high voltage parts of laser equipment Put a sign of high voltage parts and take measures for electrical shock preventi...

Page 31: ...o users of laser products In this standard the regulation classifies laser products according to the level of hazard and provides the safety measures for classes Refer to the sensor head specifications light source Page 39 Sensor Head Specifications FDA compliant product The laser displacement sensor MH11 sensor heads are all FDA compliant products Laser classes are classified according to the FDA...

Page 32: ...ed in a Chinese or Korean speaking region attach the Chinese Korean laser warning label ND filter sold separately The following shows the recommended ND filter MH11F98 Page 53 ND Filter Specifications Item Quantity Sensor head 1 Laser warning label written in Japanese English Chinese and Korean 1 Before Using the Product document 1 Item Quantity Sensor head 1 Laser warning label written in Japanes...

Page 33: ... Extension cable for sensor head includes the following products All the cables are bending resistant Model name Remarks MH11C20EX Length 2m Weight Approx 0 2kg MH11C50EX Length 5m Weight Approx 0 4kg MH11C100EX Length 10m Weight Approx 0 7kg MH11C200EX Length 20m Weight Approx 1 4kg MH11C300EX Length 30m Weight Approx 2 0kg ...

Page 34: ...ainst damage caused by laser light 2 Measurement range indicator RANGE Measurement value status is displayed On Around the measurement center yellow Flashing Within the measurement range yellow Off Outside the measurement range A measurement range indicator RANGE of the sensor head that is not specified in output selection turns off 3 Light emitting part Emits a laser beam 4 Light receiving part R...

Page 35: ... For more accurate measurement and for more stable measurement install the sensor head in the directions shown below in relation to the measurement object Direction in relation to a moving object When there are differences in materials or color When performing measurement of a moving measurement target object with extremely different materials and colors the sensor head can be installed in the dir...

Page 36: ...Installation Method When there are step differences When there are step differences in a moving target object measurement the sensor head can be installed as shown below to perform measurement while suppressing the effects of step edges ...

Page 37: ...ution In this case perform installing as follows to boost the received light intensity When installing the sensor head on a wall surface To avoid multiple reflected lights on a wall surface from entering the light receiving part install the sensor head as shown below In addition when the reflectance of the wall surface is high setting to a non glossy black color can be effective Specular reflectio...

Page 38: ...ht emitting laser beam and light receiving laser beam to the measurement object is left right symmetrical When positioned correctly the measurement object and specular reflection line slope of sensor head are perpendicular to each other as shown below For the measurement center distance and measurement range refer to the sensor head specifications Page 39 Sensor Head Specifications MH11H05 0 NA an...

Page 39: ... provided M2 6 4 bind screws to firmly fix the filter in place Set the tightening torque to 0 3N m or less Precautions Attach the ND filter with care to avoid leaving fingerprints or scratches on the glass area In addition if it gets contaminated with fingerprints or due to other reasons use an optical cloth to wipe it down so as to avoid scratching ND filter MH11H03B0 NA MH11H05 0 NA MH11H08 0 NA...

Page 40: ...is when only non conductive pollution occurs A temporary conductivity caused by condensing must be expected occasionally Item Specifications Operating ambient temperature 0 to 45 No dew condensation or icing allowed Storage ambient temperature 20 to 70 Operating ambient humidity 35 to 85 RH no dew condensation Storage ambient humidity 35 to 85 RH no dew condensation Vibration resistance Frequency ...

Page 41: ...are aluminum vapor deposition surface reflection mirror and 15mm type is transparent glass and digital measurement value Item Code Description Export regulation NA Products not subject to export regulations Beam spot S Small spot L Line spot Special specifications 0 Normal product 1 Special form product 8mm type 2 Special form product 15mm type 3 Wide measurement range product Laser class A Class ...

Page 42: ... Temperature characteristics 0 01 F S Safety distance Normal ocular hazard distance NOHD 4 Indicator Laser radiation indicator Green light emitting diode ON during laser radiation Measurement range indicator Yellow light emitting diode ON near the measurement center Flashes within the measurement range OFF outside the measurement range Protective structure IP67 excluding the connector part Polluti...

Page 43: ...IEC GB FDA Max output 1mW Emission peak wavelength 658nm Beam diameter 3 Approx 30 m Approx 30 1200 m Light receiving element Linear image sensor Resolution 0 25 m average times 256 Linearity 0 03 F S Temperature characteristics 0 01 F S Safety distance Normal ocular hazard distance NOHD 5 0 4m Indicator Laser radiation indicator Green light emitting diode ON during laser radiation Measurement ran...

Page 44: ...B FDA Max output 1mW Emission peak wavelength 658nm Beam diameter 3 Approx 70 m Approx 70 1000 m Light receiving element Linear image sensor Resolution 0 25 m average times 256 Linearity 0 03 F S Temperature characteristics 0 01 F S Safety distance Normal ocular hazard distance NOHD 5 0 4m Indicator Laser radiation indicator Green light emitting diode ON during laser radiation Measurement range in...

Page 45: ... GB FDA Max output 5mW Emission peak wavelength 658nm Beam diameter 3 Approx 70 m Approx 70 1000 m Light receiving element Linear image sensor Resolution 0 25 m average times 256 Linearity 0 03 F S Temperature characteristics 0 01 F S Safety distance Normal ocular hazard distance NOHD 5 0 4m Indicator Laser radiation indicator Green light emitting diode ON during laser radiation Measurement range ...

Page 46: ...ion peak wavelength 658nm Beam diameter 3 Approx 100 m Approx 100 1200 m Light receiving element Linear image sensor Resolution 0 6 m average times 256 0 25 m average times 4096 Linearity 0 03 F S 0 1 F S 0 03 F S 0 1 F S Temperature characteristics 0 01 F S Safety distance Normal ocular hazard distance NOHD 5 0 5m Indicator Laser radiation indicator Green light emitting diode ON during laser radi...

Page 47: ...ssion peak wavelength 658nm Beam diameter 3 Approx 100 m Approx 100 1200 m Light receiving element Linear image sensor Resolution 0 6 m average times 256 0 25 m average times 4096 Linearity 0 03 F S 0 1 F S 0 03 F S 0 1 F S Temperature characteristics 0 01 F S Safety distance Normal ocular hazard distance NOHD 5 0 5m Indicator Laser radiation indicator Green light emitting diode ON during laser ra...

Page 48: ...Class 2 JIS IEC GB FDA Max output 1mW Emission peak wavelength 658nm Beam diameter 3 Approx 80 m Approx 80 1700 m Light receiving element Linear image sensor Resolution 0 25 m average times 4096 Linearity 0 03 F S Temperature characteristics 0 01 F S Safety distance Normal ocular hazard distance NOHD 5 0 5m Indicator Laser radiation indicator Green light emitting diode ON during laser radiation Me...

Page 49: ... Class 3R JIS IEC GB FDA Max output 5mW Emission peak wavelength 658nm Beam diameter 3 Approx 80 m Approx 80 1700 m Light receiving element Linear image sensor Resolution 0 25 m average times 4096 Linearity 0 03 F S Temperature characteristics 0 01 F S Safety distance Normal ocular hazard distance NOHD 5 0 5m Indicator Laser radiation indicator Green light emitting diode ON during laser radiation ...

Page 50: ... Max output 1mW Emission peak wavelength 658nm Beam diameter 3 Approx 250 m Approx 250 3500 m Light receiving element Linear image sensor Resolution 2 0 m average times 256 0 5 m average times 4096 Linearity 0 03 F S Temperature characteristics 0 01 F S Safety distance Normal ocular hazard distance NOHD 5 1 4m Indicator Laser radiation indicator Green light emitting diode ON during laser radiation...

Page 51: ... JIS IEC GB FDA Max output 5mW Emission peak wavelength 658nm Beam diameter 3 Approx 250 m Approx 250 3500 m Light receiving element Linear image sensor Resolution 2 0 m average times 256 0 5 m average times 4096 Linearity 0 03 F S Temperature characteristics 0 01 F S Safety distance Normal ocular hazard distance NOHD 5 1 4m Indicator Laser radiation indicator Green light emitting diode ON during ...

Page 52: ...age times 4096 Linearity 0 04 F S 200 to 0mm 0 08 F S 0 to 200mm F S 200mm Temperature characteristics 0 01 F S Safety distance Normal ocular hazard distance NOHD 5 1 4m Indicator Laser radiation indicator Green light emitting diode ON during laser radiation Measurement range indicator Yellow light emitting diode ON near the measurement center Flashes within the measurement range OFF outside the m...

Page 53: ... 0 02 F S Temperature characteristics 0 02 F S Safety distance Normal ocular hazard distance NOHD 4 Indicator Laser radiation indicator Green light emitting diode ON during laser radiation Measurement range indicator Yellow light emitting diode ON near the measurement center Flashes within the measurement range OFF outside the measurement range Protective structure IP67 excluding the connector par...

Page 54: ... 0 02 F S Temperature characteristics 0 02 F S Safety distance Normal ocular hazard distance NOHD 4 Indicator Laser radiation indicator Green light emitting diode ON during laser radiation Measurement range indicator Yellow light emitting diode ON near the measurement center Flashes within the measurement range OFF outside the measurement range Protective structure IP67 excluding the connector par...

Page 55: ... MH11H05 0LNA MH11H08 0SNA MH11H08 0LNA MH11H11 0SNA MH11H11 0LNA MH11H35 0SNA MH11H35 0LNA MH11H35C3SNA MH11H35C3LNA Reduced intensity rate 98 1 Shock resistance 196m or more X Y Z directions 3 times each Operating ambient temperature 0 to 45 No dew condensation or icing allowed At storage 20 to 70 Operating ambient humidity 35 to 85 RH At storage 35 to 85 RH Material Mounting support area Alumin...

Page 56: ...ngerprints use soft lens cleaning cloth or lens cleaner paper to lightly wipe them out Use cloth moistened with a small amount of alcohol to wipe out tough dirt carefully Molded resin is used in some parts of the sensor head Do not use organic solvents such as thinner and benzene to wipe dirt on it Otherwise molded resin may be dissolved Do not wipe the glass portion of laser aperture too hard Scr...

Page 57: ...3 MAINTENANCE AND INSPECTION 3 2 Inspection 55 3 MEMO ...

Page 58: ...UBLESHOOTING 4 TROUBLESHOOTING For details on occurring errors and troubleshooting when using a sensor head refer to the following MELSEC iQ R Laser Displacement Sensor Control Module User s Manual Application ...

Page 59: ...4 TROUBLESHOOTING 57 4 MEMO ...

Page 60: ...nce surface Measurement center distance Light emission axis Light reception axis Measurement range indicator yellow Laser emission indicator green 2 M5 mounting hole Depth 8 same as the hole at the diagonal position Measurement center distance Light emission axis Light reception axis 2 M5 mounting hole Depth 10 same as the hole at the diagonal position Measurement range indicator yellow Laser emis...

Page 61: ...ment center distance Light emission axis Light reception axis 26 50 5 36 74 64 ø6 6 6 2 13 9 75 90 64 69 5 550 ø14 7 Measurement center distance Light reception axis 2 M5 mounting hole Depth 10 same as the hole at the diagonal position Laser emission indicator green Measurement range indicator yellow Light emission axis 46 18 28 2 55 4 91 1 4 9 101 89 37 7 9 3 8 Specular reflection line The refere...

Page 62: ... 5 ø6 6 ø14 7 550 Measurement center distance Light reception axis 2 M5 mounting hole Depth 10 same as the hole at the diagonal position Laser emission indicator green Measurement range indicator yellow Light emission axis 81 4 14 23 1 52 5 88 3 5 4 98 7 86 3 44 9 3 5 Measurement center distance Light reception axis Light emission axis Specular reflection line The reference surface for specular re...

Page 63: ...ge indicator yellow Measurement center distance 2 M5 mounting hole Depth 10 same as the hole at the diagonal position Light emission axis Laser emission indicator green Measurement center distance Light emission axis Light reception axis Specular reflection line The reference surface for specular reflection installation Light reception axis Measurement range indicator yellow Measurement center dis...

Page 64: ...ce for specular reflection installation Measurement center distance Light emission axis Light reception axis 26 350 5 8 8 74 64 ø6 6 6 2 13 9 75 90 64 69 5 ø14 7 550 Measurement center distance Light reception axis 2 M5 mounting hole Depth 10 same as the hole at the diagonal position Laser emission indicator green Measurement range indicator yellow Light emission axis ...

Page 65: ...14 7 ø6 6 62 64 5 5 18 39 27 80 84 2 ø4 5 mounting hole Light emission axis Light reception axis Measurement range indicator yellow Laser emission indicator green 30 38 12 61 49 57 127 135 17 10 3 38 28 15 50 ø4 5 ø8 18 8 4 550 ø6 6 ø14 7 95 19 26 34 5 5 92 5 100 2 ø4 5 mounting hole Measurement range indicator yellow Laser emission indicator green Light emission axis Light reception axis ...

Page 66: ... ND filter attached MH11H03B0SNA MH11H03B0LNA Unit mm Specular reflection installation ND filter attached MH11H03B0SNA MH11H03B0LNA Unit mm Installing dimensions are also the same in the applicable sensor heads other than the MH11H03B0SNA and MH11H03B0LNA 2 25 2 15 22 7 7 11 22 15 2 2 25 1 6 1 6 9 ...

Page 67: ... 55 0 70 0 85 0 12 0 02 0 12 Measurement range Measurement center distance MH11H01A0SNA Small spot MH11H01A0LNA Line spot 0 22 0 03 0 22 0 85 1 2 1 55 0 18 0 18 0 03 0 03 0 18 0 18 Measurement range Measurement center distance MH11H03B0SNA Small spot MH11H03B0LNA Line spot 0 13 0 07 0 13 0 7 1 0 1 3 0 11 0 11 0 07 0 07 0 11 0 11 Measurement range Measurement center distance MH11H05 0SNA Small spot...

Page 68: ... 25 Measurement range Measurement center distance MH11H08 0SNA Small spot MH11H08 0LNA Line spot 0 24 0 08 0 24 1 2 1 7 2 2 0 2 0 2 0 08 0 08 0 2 0 2 Measurement range Measurement center distance MH11H11 0SNA Small spot MH11H11 0LNA Line spot 0 35 0 25 0 35 2 8 3 5 4 2 0 35 0 35 0 25 0 25 0 35 0 35 Measurement range Measurement center distance MH11H35 0SNA Small spot MH11H35 0LNA Line spot ...

Page 69: ...surement range Measurement center distance MH11H35C3SNA Small spot MH11H35C3LNA Line spot ø0 12 0 55 0 12 0 70 0 85 0 12 0 02 ø0 12 ø0 02 Measurement range Measurement center distance MH11H01A1SNA Small spot MH11H01A1LNA Line spot 1 25 0 14 ø0 14 ø0 14 1 40 0 03 ø0 03 1 55 0 14 Measurement range Measurement center distance MH11H01A2SNA Small spot MH11H01A2LNA Line spot ...

Page 70: ...l within the shaded areas in the following figures Install sensor heads so that the laser spots from other sensor heads fall outside the shaded areas 30mm type MH11H03B0SNA MH11H03B0LNA Unit mm 50mm type MH11H05B0SNA MH11H05B0LNA MH11H05C0SNA MH11H05C0LNA Unit mm 85mm type MH11H08B0SNA MH11H08B0LNA MH11H08C0SNA MH11H08C0LNA Unit mm 11 1 3 13 2 1 11 24 5 35 5 9 10 3 2 13 5 2 10 45 55 9 35 6 3 24 6 ...

Page 71: ...SNA MH11H35B0LNA MH11H35C0SNA MH11H35C0LNA Unit mm 350mm type MH11H35C3SNA MH11H35C3LNA Unit mm If beam from the other sensor head enters the mutual interference area when two sensor heads are connected turn on the interference prevention function 9 16 3 2 20 5 2 30 95 125 9 30 5 23 3 100 400 300 3 3 8 8 160 11 47 18 150 400 550 ...

Page 72: ... Version Appendix 3 How to Confirm Serial Number and Function Version The serial number and function version of the sensor head can be confirmed by the rating plate on the side of the product 1 Serial number 2 Function version 3 Applicable standard symbol 1 2 3 ...

Page 73: ... 4 Export Regulations by Japanese Government 71 A Appendix 4 Export Regulations by Japanese Government The products have specifications not subject to export regulations by the Foreign Exchange and Foreign Trade Law ...

Page 74: ...the ND filter 37 C Control module 11 E Engineering tool 11 F F S 11 FDA 29 J JIS IEC GB 15 L Laser displacement sensor 11 M Measurement center distance 11 Measurement range 11 N ND filter 64 S Sensor head 11 Setting tool 11 ...

Page 75: ...I 73 MEMO ...

Page 76: ...te Manual number Description June 2019 SH NA 082023ENG A First edition This manual confers no industrial property rights of any other kind nor does it confer any patent licenses Mitsubishi Electric Corporation cannot be held responsible for any problems involving industrial property rights which may occur as a result of using the contents noted in this manual ...

Page 77: ...when Mitsubishi s products are mounted and used in the customer s devices and could have been avoided if the customer s devices had functions constructions considered as safety mechanisms or industry standards which should be provided according to the legal regulations the customer s device is subject to 4 Failures which could have been avoided when servicing replacing consumable parts specified i...

Page 78: ...mes system names and product names mentioned in this manual are either registered trademarks or trademarks of their respective companies In some cases trademark symbols such as or are not specified in this manual SH NA 082023ENG A ...

Page 79: ......

Page 80: ...ithout notice When exported from Japan this manual does not require application to the Ministry of Economy Trade and Industry for service transaction permission HEAD OFFICE TOKYO BUILDING 2 7 3 MARUNOUCHI CHIYODA KU TOKYO 100 8310 JAPAN NAGOYA WORKS 1 14 YADA MINAMI 5 CHOME HIGASHI KU NAGOYA JAPAN ...

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