PPS-60
Precision Positioner Stage
Rev: 1.04
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
5
Reference Manual
2.
Model configurations
2.1
PPS-60 Order Numbers
*SM-001 internal standard installation on stages with 50mm or less travel.
SM-003 external standard installation on stages with 100mm or greater travel.
**Linear motor is not available with open loop or in vacuum environments.
***Only available with option 3 digital encoder.
†
Only available with Piezo motor option or externally mounted UHV stepper motor.
‡
Not available in vacuum environments.
╝
Only available with Piezo motor.
Contact MICRONIX USA for custom applications and stacking configurations.
Order No.
PPS-60-
Piezo Motor PM-003
1
Stepper Motor, SM-001*
2
Linear Motor, LM-002**
3
Stepper Motor, SM-003*
4
25mm Travel
1
50mm Travel
2
100mm Travel
3
200mm Travel
4
300mm Travel
5
None (Open Loop)
0
Analog (1V
pp
)
2
Digital (RS-422)
3
Digital low cost, 0.5
μ
m
‡
4
No Limit Switch
╝
0
Mechanical
1
Optical***
2
Atmospheric
0
High Vacuum, 10
-6
mbar
6
Ultra High Vacuum, 10
-9
mbar
†
9
