PPS-60
Precision Positioner Stage
Rev: 1.04
MICRONIX USA,LLC
Irvine, California
www.micronixsusa.com
15
Reference Manual
5.1
Vacuum Environments
5.1.1
Handling and Preparation
When preparing the stage for vacuum environments, take the necessary
precautions (such as wearing gloves, clean room, clothing, etc.) when
handling the stage as to avoid any contaminants. Maximum Bake-out
temperature is 100°C. MICRONIX USA can supply the stage with vacuum
compatible connectors: 9-pin female PEEK connector for open loop, 15-Pin
female PEEK connector for closed loop with analog encoder, 25-pin female
PEEK connector for closed loop with MII 6000 digital encoder.
5.1.2
Open loop Installation & Wiring Diagram
Connecting an open loop PPS-60 in a vacuum chamber requires the use of a
feed through connector at the vacuum chamber wall. The vacuum
compatible PPS-60 will be supplied with wiring for a straight through feed
through, not a cross over gender changer. MICRONIX USA supplies test
connectors that simulate the vacuum feed through to allow for functionality
testing prior to installation in a vacuum chamber. Note: Linear motor versions
and low cost digital encoder versions are not available for vacuum
environments. For details regarding the pin-out and feed through specifications
see the Appendix section A.5.
Internal Piezo and Stepper Versions
External Version
Temporary test
connectors are
standard. Requires
customer supplied
feed through
connector
