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X9751122-A010014MSC
MICRO-EPSILON
Functional Principle, Technical Data
2.2.2 Sensors
The sensors are connected to the controller with a 1.6 m (5 ft) long triaxial cable. In order to obtain accurate
measuring results, the surface of the sensor must be kept clean and free from damage.
The capacitive measuring process is area-related. A minimum area is required depending on the sensor
model and measuring range.
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2.3
Technical Data
DT 6630-S600-1(02)-C1,6 DT 6630(01)-S600-1(02)-C1,6 DT 6630(15)-S600-1(02)-C1,6
200 µm
400 µm
100 µm
50 µm
100 µm
70 µm
calibrated
1
±0.1 µm
±0.4 µm
±0.05 µm
uncalibrated
2
±0.4 µm
±1.6 µm
±0.2 µm
static
3
0.1 nm
0.2 nm
0.1 nm
dynamic (1 kHz)
10 nm
20 nm
5 nm (4 kHz)
Repeatability
static
0.0004 µm
0.0015 µm
0.0004 µm
Model
Measuring range
SMR
Linearity
Resolution
SMR = Start of
measuring range
