18
(E)
BS78
4. Spcifications
Specification
Performance and functions
Measuring length mm (inch)
10 (N, NS only), 40, 70, 120, 170, 220, 270, 320, 370, 420
Overall length mm (inch)
58 mm (Measuring length: 10 mm) Open-sided type
Measuring 26 mm (measuring length 40 to 420 mm)
Max. travel mm (inch)
Measuring 2 mm (Measuring length: 10 mm) Open-
sided type
Measuring 10 mm (measuring length 40 to 420 mm)
Scale accuracy (At 20
°
C/68
°
F)
NS/RS type
Measuring length 10 mm
:
±
0.03
µ
m or less
Measuring length 40 mm
:
±
0.04
µ
m or less
Measuring length 70/120 mm
:
±
0.10
µ
m or less
Measuring length 170/220 mm
:
±
0.18
µ
m or less
Measuring length 270 mm
:
±
0.25
µ
m or less
Measuring length 320 mm
:
±
0.34
µ
m or less
Measuring length 370 mm
:
±
0.39
µ
m or less
Measuring length 420 mm
:
±
0.44
µ
m or less
N/R type
Measuring length 10 mm
:
±
0.06
µ
m or less
Measuring length 40 mm
:
±
0.08
µ
m or less
Measuring length 70/120 mm
:
±
0.20
µ
m or less
Measuring length 170/220 mm
:
±
0.35
µ
m or less
Measuring length 270/320/370 mm :
±
0.50
µ
m or less
Measuring length 420 mm
:
±
0.65
µ
m or less
Reference point accuracy
±
0.1
µ
m (R/RS)
Return error
This is virtually eliminated. It should be considered to be less
than two resolution limits of the detector that is used.
Repeatability
This is virtually eliminated. It should be considered to be less
than one resolution limit of the detector that is used.
Temperature coefficient
°
C
−
1
(
°
F
−
1
)
−
0.7
×
10
−
6
(0.39
×
10
−
6
)
Light source
Semiconductor laser 790 nm
Detecting mode
Diffraction grating scanning interferometer
Operating temperature
°
C (
°
F)
+10 to +30 (+50 to +86) (no moisture condensation)
Storage temperature
°
C (
°
F)
−
10 to +50 (+14 to +122) (Humidity: 60 % or less)
Supplied accessories
Scale measuring length
10
40
70
120
170
220
270
320
370
420
Instruction manual
1
1
1
1
1
1
1
1
1
1
M3
×
8 hex. socket-head cap screw
2
—
—
—
—
—
—
—
—
—
M3
×
30 hex. socket-head cap screw
2
2
2
2
2
2
2
2
2
2
M4
×
8 hex. socket-head cap screw
—
4
6
8
8
8
10
10
12
12
Plain washer (nominal 3)
4
2
2
2
2
2
2
2
2
2
Plain washer (nominal 4)
—
4
6
8
8
8
10
10
12
12
Reference plate
—
1
1
1
1
1
1
1
1
1
Spacer
—
—
—
2
2
2
2
2
4
4
Scale clamp
—
1
2
3
3
3
4
4
5
5
Cable clamp
1
1
1
1
1
1
1
1
1
1
M4
×
8 small screw
1
1
1
1
1
1
1
1
1
1
Accuracy chart
1
1
1
1
1
1
1
1
1
1
Reference point masking label (R/RS) —
5
5
5
5
5
10
10
10
10
Contents of the package
Detector head
1
Scale
1
1 set of supplied accessories
1
